ExperimentalMaterials Synthesis: The SBA-15 template was prepared by adding 4.0 g tri-block copolymer poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (EO 20 PO 70 EO 20 ) to a solution of 25 g (35 wt.-%) HCl and 125 g water under stirring. After stirring for 2 h, the copolymer was completely dissolved, after which 8.6 g TEOS was added. Following continuous stirring for 20 h at 35 C, the reaction mixture was transferred to a Teflon-lined autoclave and heated at 100 C for 24 h. The resulting product was obtained by filtration, washed repeatedly with a large amount of water, air-dried at room temperature, and calcined at 500 C for 6 h to remove the surfactant. The calcined SBA-15 was used as template for the preparation of mesoporous carbon CMK-3 by CVD as follows: 0.3 g of calcined SBA-15 was placed in an alumina boat and inserted into a flowthrough tube furnace. Under a flow of nitrogen saturated with styrene vapor at room temperature, the temperature of the furnace was increased, at a ramp rate of 20 C min ±1 , to the final pyrolysis/carbonization temperature (in the range 850±1050 C) and maintained for 3 h under the styrene-saturated nitrogen atmosphere. The furnace was then cooled to room temperature and the resulting SBA-15/carbon mesophase was thoroughly washed with hydrofluoric acid (HF) to etch out the silica. For comparison we also prepared a CMK-3 sample via liquid impregnation (designated CMK-3I) using the method of Jun et al. [4]. Sucrose was used as carbon source and carbonization was performed at 900 C for 7 h [4]. The mesoporous carbon was then recovered by etching the silica in HF. We also prepared CMK-3 samples using other carbon sources, e.g., acetonitrile.Characterization: Powder XRD analysis was performed using a Philips 1830 powder diffractometer with Cu Ka radiation (40 kV, 40 mA). Nitrogen sorption isotherms and textural properties of the materials were determined at ±196 C using nitrogen in a conventional volumetric technique by a Coulter SA3100 sorptometer. Before analysis, the samples were oven dried at 150 C and evacuated for 12 h at 200 C under vacuum. The surface area was calculated using the Brunauer±Emmett±Teller (BET) method based on adsorption data in the partial pressure (P/P 0 ) range 0.05±0.2, and the total pore volume was determined from the amount of the nitrogen adsorbed at P/P 0 » 0.99. The micropore surface area and micropore volume were obtained via t-plot analysis. SEM images were recorded using a JEOL JSM-820 scanning electron microscope. Samples were mounted using a double-sided conductive carbon sticky tape. A thin (ca. 10 nm) coating of gold sputter was deposited onto the samples to reduce the effects of charging. Thermogravimetric analysis of the silica/carbon (i.e., SBA-15/CMK-3) composite materials was performed using a Perkin Elmer Pyris 6 TG analyzer (heating rate of 20 C min ±1 ) in static-air conditions. The field of microelectronics has developed rapidly over the last fifteen years, and its evolution is documented by the contin...