2023
DOI: 10.1063/5.0138889
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Dual pulsed laser deposition system for the growth of complex materials and heterostructures

Abstract: Here, we present an integrated ultra-high-vacuum (UHV) apparatus for the growth of complex materials and heterostructures. The specific growth technique is the Pulsed Laser Deposition (PLD) by means of a dual-laser source based on an excimer KrF ultraviolet and solid-state Nd:YAG infra-red lasers. By taking advantage of the two laser sources—both lasers can be independently used within the deposition chambers—a large number of different materials—ranging from oxides to metals, to selenides, and others—can be s… Show more

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Cited by 7 publications
(5 citation statements)
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“…Our system -named Dual-PLD -takes advantage of two independent laser sources -namely, an excimer KrF ultraviolet (UV) and a solid-state Nd:YAG infra-red (IR) one -focused on the same target position, thus allowing the deposition of different materials in the form of thin films and/or heterostructures with both the lasers. 12…”
Section: Methodsmentioning
confidence: 99%
“…Our system -named Dual-PLD -takes advantage of two independent laser sources -namely, an excimer KrF ultraviolet (UV) and a solid-state Nd:YAG infra-red (IR) one -focused on the same target position, thus allowing the deposition of different materials in the form of thin films and/or heterostructures with both the lasers. 12…”
Section: Methodsmentioning
confidence: 99%
“…16 We used the multipurpose PLD facility directly connected to the distribution chamber of the APE beamline to produce and characterize in situ undoped 2H-MoS 2 films and doped with Co (Co-MoS 2 ) and Mn (Mn-MoS 2 ) grown on an Nb:SrTiO 3 (NbSTO) substrate. 17 The in situ transfer technology offered by the NFFA-Trieste allowed measurements by surface sensitive X-ray photoemission (XPS) and X-ray absorption (XAS) techniques avoiding any surface contamination that may affect the sample properties. In this study, we performed resonant photoemission spectroscopy (RESPES) with photon energies across the Mn and Co absorption L-edges, and the Mo M-edge, to study the electronic occupation close to the Fermi level.…”
Section: Introductionmentioning
confidence: 99%
“…Epitaxial Cr 1.6 Te 2 thin films were grown by pulsed laser deposition (PLD) utilizing a Nd:YAG laser source operating at its first harmonics (λ = 1064 nm) falling in the infrared regime. , Such a laser ablates a rotating stoichiometric polycrystalline Cr 1.6 Te 2 target (purity 99.99%) placed at a distance of 9.5 cm from the substrate (Figure a). This mechanism allows for a few-nanometers-thick material to be synthesized with the precision of a single monolayer.…”
mentioning
confidence: 99%