Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Abstract

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.

Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators

“…With the advancement of MEMS, there has been more and more attention paid to the impact of complex environments on MEMS dynamics [ 6 ]. To optimize the design of these MEMS devices, it is essential to fully understand the statics/dynamics of the system [ 7 , 8 , 9 ].…”

Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer

“…Mode localized MEMS sensors achieve several advantages such as high sensitivity [ 7 ] and common-mode rejection [ 8 ]. From then on, a series of mode-localized sensors have been created with incredible sensitivity [ 9 , 10 ].…”