Dual-Sensing System for Monitoring Ion Concentration Change in Electrochemical Micro Machining

Abstract

Currently, no reliable electrolyte concentration monitoring method exists for ultra-short pulsed electrochemical micromachining. A dual-sensing system for electrolyte concentration monitoring is proposed in this work. An inductance element is added into the classical pulsed electrochemical micromachining circuit system. For it, a modified circuit equation is proposed by which the coupled electronic and ion circuit is analyzed, and two modes of the coupled circuit are found. The asynchronous mode is used to monitor the concentration changes of the ions in electromechanical micromachining, and a novel method of electrolyte concentration monitoring is obtained. Combining this method with the shortcircuit frequency monitoring method, an electrolyte concentration monitoring method based on the dualsensing monitoring system is proposed, and corresponding monitoring software is produced. The software is used in actual microstructure processing experiments, obtaining nanometer-scale machining accuracy. INDEX TERMS dual sensing system, monitoring ion concentration, electrochemistry, micro machining.