Dual-wavelength interferometry based on the spatial carrier-frequency phase-shifting method

Huang, Linbo; Liu, Xiaoxu; Zhou, Yunfei; Tian, Jing; Zhong, Liu

doi:10.1364/ao.55.002363

Cited by 13 publications

(8 citation statements)

References 22 publications

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“…For comparison, the temporal FT method (FDPR) [29] and the special phase-shift method such as the 2π phase shift approach (TSPS) [20] are adopted to process the dual-wavelength phase-shift moiré fringe patterns separately in the simulation. The phase shifts of the simulated interferograms are set as required in corresponding algorithms.…”

Section: Numerical Simulationsmentioning

confidence: 99%

“…Compared with the temporal FT method (FDPR) [29], the proposed MTS method is better with the advantage of less processing time and frames of interferograms in the simulations. And the requirement of the phase shift for the MTS method is much less strict than the 2π special phase-shift method (TSPS) [20].…”

Section: Numerical Simulationsmentioning

confidence: 99%

“…As for the algorithms of the moiré interferograms captured by monochrome CCD, they mainly are the non-iterative and iterative methods according to the demodulation process. The iterative methods need more interferograms and iterations to improve the precision [18][19][20]. For the non-iterative methods, the dual-wavelength moiré interferograms are processed based on the special phase shifts method, principal component analysis method (PCA), and the Fourier transform method (FT).…”

Section: Introductionmentioning

confidence: 99%

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Phase retrieval from the phase-shift moiré fringe patterns in simultaneous dual-wavelength interferometry

Cheng¹,

Gao²,

Bie³

et al. 2018

J. Opt.

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Simultaneous dual-wavelength interferometry (SDWI) could extend the measured range of each single-wavelength interferometry. The moiré fringe generated in SDWI indirectly represents the information of the measured long synthetic-wavelength phase, thus the phase demodulation is rather arduous. To address this issue, we present a method to convert the moiré fringe pattern into a synthetic-wavelength interferogram (moiré to synthetic-wavelength, MTS). After the square of the moiré fringe pattern in the MTS method, the additive moiré pattern is turned into a multiplicative one. And the synthetic-wavelength interferogram could be obtained by a low-pass filtering in spectrum of the multiplicative moiré fringe pattern. Therefore, when the dual-wavelength interferometer is implemented with the π/2 phase shift at a sequence of synthetic-wavelength phase-shift interferograms with π/2 phase shift could be obtained after the MTS method processing on the captured moiré fringe patterns. And then the synthetic-wavelength phase could be retrieved by the conventional phase-shift algorithm. Compared with other methods in SDWI, the proposed MTS approach could reduce the restriction of the phase shift and frame numbers for the adoption of the conventional phase-shift algorithm. Following, numerical simulations are executed to evaluate the performance of the MTS method in processing time, frames of interferograms and the phase shift error compensation. And the necessary linear carrier for MTS method is less than 0.11 times of the traditional dual-wavelength spatial-domain Fourier transform method. Finally, the deviations for MTS method in experiment are 0.97% for a step with the height of 7.8 μm and 1.11% for a Fresnel lens with the step height of 6.2328 μm.

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Section: Numerical Simulationsmentioning

confidence: 99%

Section: Numerical Simulationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Phase retrieval from the phase-shift moiré fringe patterns in simultaneous dual-wavelength interferometry

Cheng¹,

Gao²,

Bie³

et al. 2018

J. Opt.

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show abstract

“…Huang et. al (17) developed a dual-wavelength interferometry based on the spatial carrier-frequency phase-shifting method, where the least squares method is iteratively utilized. Thus it also has a heavy computational time and memory requirements.…”

Section: Introductionmentioning

confidence: 99%

Extended depth-range dual-wavelength interferometry based on iterative two-step temporal phase-unwrapping

Wang

Zhou

et al. 2017

Journal of Modern Optics

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Phase retrieval is one of the most challenging processes in many interferometry techniques. To promote the phase retrieval, Xu et. al [X. Xu, Y. Wang, Y. Xu, W.Jin. 2016] proposed a method based on dual-wavelength interferometry.However, the phase-difference brings large noise due to its low sensitivity and signal-to-noise ratio (SNR). Beside, special phase shifts are required in Xu's method. In the light of these problems, an extended depth-range dual-wavelength phase-shifting interferometry is proposed. Firstly, the least squares algorithm is utilized to retrieve the single-wavelength phase from a sequence of N-frame simultaneous phase-shifting dual-wavelength interferograms (SPSDWI) with random phase shifts. Then the phase-difference and phase-sum are calculated from the wrapped phases of single wavelength, and the iterative two-step temporal phase-unwrapping is introduced to unwrap the phase-sum, which can extend the depth-range and improve the sensitivity.Finally, the height of objects is achieved. Simulated experiments are conducted to demonstrate the superb precision and overall performance of the proposed method.

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“…This class brings together methods of white light interferometry [1,2], phase shift interferometry [3][4][5], digital holographic microscopy [6,7], laser interference microscopy [8,9], coherent phase microscopy [10], coherent correlation interferometry [11,12], etc.…”

Section: Introductionmentioning

confidence: 99%

Nanoscale surface characterization using laser interference microscopy

Ignatyev¹,

Skrynnik²,

Melnik

2017

Mechanics & Industry

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Abstract. Nanoscale surface characterization is one of the most significant parts of modern materials development and application. The modern microscopes are expensive and complicated tools, and its use for industrial tasks is limited due to laborious sample preparation, measurement procedures, and low operation speed. The laser modulation interference microscopy method (MIM) for real-time quantitative and qualitative analysis of glass, metals, ceramics, and various coatings has a spatial resolution of 0.1 nm for vertical and up to 100 nm for lateral. It is proposed as an alternative to traditional scanning electron microscopy (SEM) and atomic force microscopy (AFM) methods. It is demonstrated that in the cases of roughness metrology for super smooth (Ra >1 nm) surfaces the application of a laser interference microscopy techniques is more optimal than conventional SEM and AFM. The comparison of semiconductor test structure for lateral dimensions measurements obtained with SEM and AFM and white light interferometer also demonstrates the advantages of MIM technique.

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Dual-wavelength interferometry based on the spatial carrier-frequency phase-shifting method

Cited by 13 publications

References 22 publications

Phase retrieval from the phase-shift moiré fringe patterns in simultaneous dual-wavelength interferometry

Phase retrieval from the phase-shift moiré fringe patterns in simultaneous dual-wavelength interferometry

Extended depth-range dual-wavelength interferometry based on iterative two-step temporal phase-unwrapping

Nanoscale surface characterization using laser interference microscopy

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