Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

Mukaida, Mao; Yan, Jiwang

doi:10.1016/j.ijmachtools.2016.11.004

Cited by 147 publications

(59 citation statements)

References 37 publications

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“…Using Eqs. (1)- (19), parameters θ i and ϕ i , SD ni and SSD ni , SD m (or SD nm ) and SSD m (or SSD nm ) can be calculated by the material properties of workpiece, tool geometries and cutting parameters. In other words, the depths of all cracks in shoulder region, and the surface and subsurface damage depths of the final cut surface could be evaluated based on Eqs.…”

Section: Theoretical Modelmentioning

confidence: 99%

“…In other words, the depths of all cracks in shoulder region, and the surface and subsurface damage depths of the final cut surface could be evaluated based on Eqs. (1)- (19). The calculation procedure is shown in Fig.…”

Section: Theoretical Modelmentioning

confidence: 99%

“…(1) firstly; (2) dividing the range of 0 to h m into enough equal intervals, each corresponding h i could be obtained; (3) the transition angles θ i and ϕ i at each h i could be calculated by Eqs. (19) and (8) respectively, and the half apex angle α could be calculated by Eqs. (5) and (6); (4) according to the material properties of workpiece, the normal load F i , C li , C wi and C mi at each h i could be obtained by Eq.…”

Section: Theoretical Modelmentioning

confidence: 99%

“…The surface roughness could reach about 1.5 nm. Mao et al [19] used diamond turning with a slow tool servo to machine the spherical concave microlens array on single-crystal silicon (001) by ductile mode cutting. The microlens array had a form error of ∼300 nm peak-valley.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal

et al. 2019

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With single-point diamond turning (SPDT), a series of samples are processed under different cutting parameters. The brittle-ductile transition depth of ZnSe crystal is obtained, and the damages of the samples are measured from surface and subsurface damage depths as well as damage density. The effects of cutting parameters on the damages are investigated quantitatively. The results show the cutting depth has a minor while the feed has a major effects on the damages. Also, the interaction effect between feed and cutting depth is very small for surface damage depth or damage density, while it is large for subsurface damage depth. Based on the indentation mechanics and the kinetic characteristics of SPDT, a model is proposed to evaluate the surface and subsurface damage depths of ZnSe crystal by cutting parameters. The model has an average relative error less than 15.0%, which could be further used to obtain the depth and the removal characteristics of cracks in shoulder region.

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Section: Theoretical Modelmentioning

confidence: 99%

Section: Theoretical Modelmentioning

confidence: 99%

Section: Theoretical Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal

et al. 2019

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“…Near-rotational freeform surface with nano-metric surface roughness has been achieved efficiently. Microlens arrays of single-crystal silicon have also been machined in ductile region by slow tool servo (STS) ultra-precision turning [206]. However, to eliminate the formation of cracks in cutting of brittle materials, the UCT is less than the critical UCT which is a relatively small value and usually in nano-metric scale.…”

Section: Influence Of Brittle Materialsmentioning

confidence: 99%

Recent Advances in Micro/Nano-cutting: Effect of Tool Edge and Material Properties

Fang

2018

Nanomanuf Metrol

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Micro-and nano-machining technology has been applied in industry to generate high-precision parts with micro/nanometric accuracy or feature size in the recent decades. Cutting is one of the most powerful manufacturing processes, and the material removal mechanism is urgently demanded by the industry to understand and improve the micro/nano-machining process efficiently at a low cost. This paper presents the recent advances in cutting mechanism and its applicability for predicting the surface generation and chip formation, especially when material is removed in micro-and nanoscale. In addition to the industry-concerned performance parameters, fundamental physical parameters such as stresses, strains, temperatures, phase transformation, minimum uncut chip thickness and size effects are discussed in this paper for the indepth understanding of the micro/nano-cutting process.

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Concave microlens arrays with tunable curvature for enhanced photodegradation of organic pollutants in water: A non‐contact approach

Lu,

Li,

Kassim

et al. 2023

EcoMat

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Solar‐driven photodegradation for water treatment faces challenges such as low energy conversion rates, high maintenance costs, and over‐sensitivity to the environment. In this study, we develop reusable concave microlens arrays (MLAs) for more efficient solar photodegradation by optimizing light distribution. Concave MLAs with the base radius of μm are fabricated by imprinting convex MLAs to polydimethylsiloxane elastomers. Concave MLAs possess a non‐contact reactor configuration, preventing MLAs from detaching or being contaminated. By precisely controlling the solvent exchange, concave MLAs are fabricated with well‐defined curvature and adjustable volume on femtoliter scale. The focusing effects of MLAs are examined, and good agreement is presented between experiments and simulations. The photodegradation efficiency of organic pollutants in water is significantly enhanced by 5.1‐fold, attributed to higher intensity at focal points of concave MLAs. Furthermore, enhanced photodegradation by concave MLAs is demonstrated under low light irradiation, applicable to real river water and highly turbid water.image

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Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

Cited by 147 publications

References 37 publications

Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal

Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal

Recent Advances in Micro/Nano-cutting: Effect of Tool Edge and Material Properties

Concave microlens arrays with tunable curvature for enhanced photodegradation of organic pollutants in water: A non‐contact approach

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