Dynamic analysis of tapping mode atomic force microscope (AFM) for critical dimension measurement

Xiang, Wuweikai; Tian, Yanling; Liu, Xianping

doi:10.1016/j.precisioneng.2020.03.023

Cited by 13 publications

(6 citation statements)

References 28 publications

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“…On the other hand, other methods have been proposed for different types of nonlinear problems. For MEMS vibroimpact systems, a large set of studies that use the method of averaging have been proposed to predict the frequency response of vibro-impact systems [29,33,35,125,146,151]. The method of averaging assumes that the impact-induced variation in the vibration amplitude is constant over a period.…”

Section: Analytical Approximation Methodsmentioning

confidence: 99%

Micromechanical vibro-impact systems: a review

Tsai

2023

J. Micromech. Microeng.

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Spurred by the invention of the tapping-mode atomic force microscopy three decades ago, various micromechanical structures and systems that utilize parts with mechanical impact have been proposed and developed since then. While sharing most of the dynamical characteristics with macroscopic vibro-impact systems and benefiting from extensive theories developed, microscale counterparts possess higher percentage of surface force, higher resonance frequency and Q, and more prominent material and structural nonlinearities, all of which lead to unique features and in turn useful applications not seen in macroscopic vibro-impact systems. This paper will first present the basics of vibro-impact systems and techniques used for analyzing their nonlinear behaviors and then review the contact force modeling with an emphasis in microscale and numerical analysis tools. Finally, various applications of microscale vibro-impact systems will be reviewed and discussed. This review aims to provide a comprehensive picture of MEMS vibro-impact systems and inspire more innovative applications that take full advantage of the beauty of nonlinear vibro-impact dynamics in the microscale.

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Section: Analytical Approximation Methodsmentioning

confidence: 99%

Micromechanical vibro-impact systems: a review

Tsai

2023

J. Micromech. Microeng.

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“…The AFM technology comprises three different surface profiling modes, i.e., contact mode, noncontact mode and tapping mode [40]. To avoid adhesion and shear forces problems arising in the contact mode [41,42], tapping mode was used for surface profiling. The average value of surface roughness [43] was used to determine the surface roughness of the layers against the given temperatures, defined by Equation (3) as…”

Section: Methodsmentioning

confidence: 99%

Prediction of Surface Roughness as a Function of Temperature for SiO2 Thin-Film in PECVD Process

et al. 2022

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An analytical model to predict the surface roughness for the plasma-enhanced chemical vapor deposition (PECVD) process over a large range of temperature values is still nonexistent. By using an existing prediction model, the surface roughness can directly be calculated instead of repeating the experimental processes, which can largely save time and resources. This research work focuses on the investigation and analytical modeling of surface roughness of SiO2 deposition using the PECVD process for almost the whole range of operating temperatures, i.e., 80 to 450 °C. The proposed model is based on experimental data of surface roughness against different temperature conditions in the PECVD process measured using atomic force microscopy (AFM). The quality of these SiO2 layers was studied against an isolation layer in a microelectromechanical system (MEMS) for light steering applications. The analytical model employs different mathematical approaches such as linear and cubic regressions over the measured values to develop a prediction model for the whole operating temperature range of the PECVD process. The proposed prediction model is validated by calculating the percent match of the analytical model with experimental data for different temperature ranges, counting the correlations and error bars.

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“…Tapping mode (TM) is one of the most commonly used operation modes in atomic force microscopes. It can obtain high-resolution images of various information of samples, and can greatly reduce the wear of the tip and damages to the sample compared with contact mode [3]. Therefore, tapping mode atomic force microscope (TM-AFM) is widely used in various fields, including biomolecules, polymers, and nanostructures [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Simulation and experimental analysis of tip response of tapping mode atomic force microscope

Peng¹,

Chen²,

Guan³

et al. 2022

Vib. proced.

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In this study, the vertical deflection responses of tapping mode atomic force microscope (TM-AFM) micro-cantilever tip are obtained by simulation and experiment. The results show that, under the blocking of the sample on one side, the steady-state response of the tip is still a sinusoidal form almost symmetrical about the equilibrium position. Furthermore, from the perspective of energy dissipation of the micro-cantilever system, the phases of two surfaces with different properties are simulated under different background dissipation. The result shows that eliminating partial background dissipation can increase the phase contrast between the two surfaces. These results are of significance for understanding the tip response and phase optimization in TM-AFM.

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Dynamic analysis of tapping mode atomic force microscope (AFM) for critical dimension measurement

Cited by 13 publications

References 28 publications

Micromechanical vibro-impact systems: a review

Micromechanical vibro-impact systems: a review

Prediction of Surface Roughness as a Function of Temperature for SiO2 Thin-Film in PECVD Process

Simulation and experimental analysis of tip response of tapping mode atomic force microscope

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