Dynamic Analysis of the Viscoelastic Microtweezer Under Electrostatic Forces and Thermal Fields

Abstract

This is the first study to examine the nonlinear dynamic behavior of a microtweezer under electrostatic forces by taking into account viscoelastic effects and linear and nonlinear thermal stresses. The van der Waals (vdW) forces and Casimir intermolecular forces have been included in order to consider more realistic assumptions. Hamilton's principle is applied to derive the nonlinear equations governing the system. A nonlinear partial differential equation has been converted into an ordinary nonlinear differential equation using the Galerkin method. The equations are numerically solved and the results are analyzed at different values of the effective parameters, such as the coefficients of the Casimir force and the vdW forces. Results indicate that the increase in the small size parameter and Casimir and vdW forces results in a decrease in the equivalent stiffness and, therefore, a decrease in the pole's voltage. In addition, the viscoelastic behavior causes a significant change in the stability behavior of the microbeams, and with an increase in damping, the resonance frequency increases by about 33%. Therefore, it is essential to take into account the effect of viscous damping when designing a microtweezer.