This paper describes surface acoustic wave (SAW) propagation under a periodic metallic grating structure overlaid with an SiO 2 film. An analysis was made by modifying the software FEMSDA, in which the finite element method is applied to both the grating electrodes and SiO 2 overlay. For Rayleigh-type SAW propagating on 128 • YX-LiNbO 3 , changes in the reflection coefficient and effective velocity are calculated as a function of the SiO 2 film thickness overlaying an Al grating structure. It is shown that the SiO 2 film overlaying the top surface of the grating electrodes affects both the SAW reflection coefficient and effective SAW velocity more significantly than the film overlaying the electrode gaps.