2018 IEEE International Conference on Semiconductor Electronics (ICSE) 2018
DOI: 10.1109/smelec.2018.8481244
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Dynamic Behavior of Condenser Microphone Under the Influence of Squeeze Film Damping

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“…The ultimate goal of this project is to use the SiC diaphragm in a MEMS microphone to detect poisonous gasses [32][33][34]. The data from the indentation experiment show that the maximum load that the diaphragm could take before bursting is 3 mN.…”
Section: Suitability Of Elastic Diaphragm As Acoustic Sensormentioning
confidence: 99%
“…The ultimate goal of this project is to use the SiC diaphragm in a MEMS microphone to detect poisonous gasses [32][33][34]. The data from the indentation experiment show that the maximum load that the diaphragm could take before bursting is 3 mN.…”
Section: Suitability Of Elastic Diaphragm As Acoustic Sensormentioning
confidence: 99%