“…Researchers have carried out systematic and extensive research on thermoelectric stack type thin film HFSs, which are mainly composed of three parts, substrate, thermoelectric stack sensitive layer and thermal resistance layer [22][23][24][25][26][27][28][29] . The substrates are mainly made of two materials, ceramic or metal, with ceramic substrate Al2O3 2,17,22,25,28,29 predominating and to a lesser extent AlN ceramics 18, 27. The sensitive layer is mainly made of metals, metal oxides, most of which are platinum rhodium precious metals Pt-Pt/Rh 17,19,22,23,29 and ITO-In2O3 2,21,24,28 ,and some are other precious metals, such as constantan 25 and tungsten rhenium thermocouples 18 . Among them, ITO-In2O3, as a transparent conductive oxide, has the advantages of high-temperature resistance, high output, and strong oxidation resistance in hightemperature environments, which can be used as a substitute for precious metal thermopiles 28 .…”