Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Zhang, Sha; Zhang, Wenming; Peng, Zhi-Ke; Meng, Guang

doi:10.1155/2015/867171

Cited by 4 publications

(5 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A Runge-Kutta integration technique can provide a numerical solution of the system of coupled equations. [21][22][23]…”

Section: Problem Formulationmentioning

confidence: 99%

“…Several papers have been published to consider the influence of SQFD on the dynamic behavior of the micro-beam from different perspectives. [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22] In all of these studies, the micro-beam was considered to be straight. The authors feel that there is a gap in the MEMS literature of studying the influence of SQFD on the dynamic response of curved micro-structures such as curved micro-beams and micro-arches.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

Ouakad

Al‐Qahtani

Hawwa

2016

Advances in Mechanical Engineering

View full text Add to dashboard Cite

A fixed-fixed curved micro-beam resonator under the influence of harmonic electrostatic field is considered. Due to the presence of incompressible fluid between the micro-beams and the electrode, a squeeze-film damping affects the dynamic behavior of the resonator. The combined effect of curved geometry and fluid squeeze-film damping is investigated for micro-beams with concave and convex geometries. A reduced-order model is obtained through the application of Galerkin discretization on a coupled fluid-structure system composed of the nonlinear Euler-Bernoulli beam equation and Burgdorfer's model for the neighboring fluid. The dynamic behavior is assessed by investigating the influence of squeeze-film damping on the linear and nonlinear frequency response and the maximum resonant deflection of curved up and curved down micro-beams.

show abstract

“…A Runge-Kutta integration technique can provide a numerical solution of the system of coupled equations. [21][22][23]…”

Section: Problem Formulationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

Ouakad

Al‐Qahtani

Hawwa

2016

Advances in Mechanical Engineering

View full text Add to dashboard Cite

show abstract

“…Furthermore, the range of variation of the dimensionless equivalent damping coefficient is based on the numerical values considered in the foregoing investigations [60][61][62]. A relatively accurate model of energy dissipation, based on the squeezed film effects [63,64], can be incorporated in the present setting in order to enhance the fidelity of the model. However, an exact quantification of the extent of damping remains external to the proposed technique.…”

Section: Effect Of Equilibrium Sequences and Dampingmentioning

confidence: 99%

Mitigation of residual oscillations in electrostatically actuated microbeams using a command-shaping approach

Godara

Joglekar

2015

J. Micromech. Microeng.

View full text Add to dashboard Cite

When electrostatically actuated microbeams are driven by an input-waveform comprising multiple voltage steps, the resulting response inherently contains residual oscillations, which may prove detrimental to the device performance and accuracy. In this article, we report the systematic development of a command shaping technique for mitigating such residual oscillations in electrostatically actuated microbeams and achieving fast switching between the successive equilibrium states. Invoking the force balance at a critical point in an oscillation cycle, the proposed technique relies on bringing the actuator to a stagnation state by applying an additional voltage signal of specific amplitude at a predetermined time. The underlying principle of the technique is enunciated for the lumped parallel-plates model of the microactuator, and further extended to the cases of microbeams. The electromechanical model of the microbeam incorporates the effects of full-order electrostatic nonlinearity, moderately large deflections, viscous energy dissipation, and fringing fields. The modal superposition method is employed to obtain the dynamic response of microbeams. Based on a single-mode assumption, the proposed technique lends itself to a simple multistep waveform, which is attractive from the implementation point of view. The applicability of the proposed technique is demonstrated by considering a wide range of parameters involving variations in the extent of geometric nonlinearity, damping, and equilibrium sequences. The impact of higher modes on the stabilized response is exposited, and a command shaping approach based on the multi-mode response of the actuator is suggested. In particular, such an approach is shown to be effective in controlling the motion of the beam in the vicinity of the static pull-in displacement, which is associated with strong electrostatic nonlinearity. The present investigation can find its potential use in the development of an open-loop controller for electrostatically actuated microbeams.

show abstract

“…The system mechanical properties are improved by optimizing parameters in the relevant equation, and the results from the method were verified in several cases. On the basis of [19,20], Zhang et al [21] discussed the influence of the optimized shape on the dynamic response of the microbeam. Kuang and Chen [22] optimized the mechanical properties of a micro-resonator by adjusting the microbeam thickness and gap distance.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator

Feng

Liu

Zhang

et al. 2019

Sensors

View full text Add to dashboard Cite

A class of bipolar electrostatically actuated micro-resonators is presented in this paper. Two parametric equations are proposed for changing the microbeam shape of the upper and lower sections. The mechanical properties of a micro-resonator can be enhanced by optimizing the two section parameters. The electrostatic force nonlinearity, neutral surface tension, and neutral surface bending are considered in the model. First, the theoretical results are verified with finite element results from COMSOL Multiphysics simulations. The influence of section variation on the electrostatic force, pull-in behaviors and safe working area of the micro-resonator are studied. Moreover, the impact of residual stress on pull-in voltage is discussed. The multi-scale method (MMS) is used to further study the vibration of the microbeam near equilibrium, and the relationship between the two section parameters of the microbeam under linear vibration was determined. The vibration amplitude and resonance frequency are investigated when the two section parameters satisfy the linear vibration. In order to research dynamic analysis under the case of large amplitude. The Simulink dynamics simulation was used to study the influence of section variation on the response frequency. It is found that electrostatic softening increases as the vibration amplitude increases. If the nonlinearity initially shows hardening behavior, the frequency response will shift from hardening to softening as the amplitude increases. The position of softening-hardening transition point decreases with the increase of residual stress. The relationship between DC voltage, section parameters, and softening-hardening transition points is presented. The accuracy of the results is verified using theoretical, numerical, and finite element methods.

show abstract

Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Cited by 4 publications

References 30 publications

Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

Mitigation of residual oscillations in electrostatically actuated microbeams using a command-shaping approach

Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator

Contact Info

Product

Resources

About