Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning

Bouhadda, Ismaïl; Mohand-Ousaid, Abdenbi; Moal, Patrice Le; Bourbon, Gilles; Lutz, Philippe

doi:10.1109/dtip.2017.7984472

Cited by 10 publications

(4 citation statements)

References 7 publications

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“…The whole module comprises three subsystems that guarantee the switching, the holding, and the guiding of its moving part. Each subsystem consists of flexible structures actuated by two U-shaped actuators [18]. Each actuator can provide respectively a displacement of 200 µm and a force higher than 10 mN, which are largely sufficient to actuate the multistatble and the whole robot.…”

Section: B Multistable Modulementioning

confidence: 99%

Compact Digital Microrobot Based on Multistable Modules

Mohand-Ousaid

Bouhadda²,

Bourbon³

et al. 2021

IEEE Robot. Autom. Lett.

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Current digital microrobots are mainly composed of bistable modules and flexible structures. Unlike conventional microrobots, they are based on mechanical stability instead of complex control strategies in order to reach precise and repeatable discrete positioning. By design, their number of stable positions depends on the number of bistable modules. As a consequence, increasing the robot workspace requires using several modules. In this case, the robot size increases and its miniaturization becomes complex and non-intuitive. To address this issue, a multistable module has been developed to reach several stable positions. In this paper, a new generation of digital microrobots is proposed. Based on two multistable modules and flexible structures, the new microrobot can reach a large workspace while having a small footprint. Concretely, the robot size decreases by 26% while the number of stable positions increases by 950% in comparison with the first generation of the digital microrobot. A prototype is designed, fabricated and characterized experimentally. Preliminary results show a good agreement between the expected and the achieved workspace. The robot achieves 169 stable positions with a discrete step of 4.125 µm and a resolution of 150 nm. With these capabilities, the robot paves the way for promising perspectives and applications, in particular precise micro-manipulation in confined environment such as a Scanning Electron Microscope.

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Section: B Multistable Modulementioning

confidence: 99%

Compact Digital Microrobot Based on Multistable Modules

Mohand-Ousaid

Bouhadda²,

Bourbon³

et al. 2021

IEEE Robot. Autom. Lett.

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“…The U-shaped actuator is fabricated by DRIE technology [25,26]. DRIE technology [23,24] is applied to the fabrication of the Si-based actuator.…”

Section: Experimental Validationmentioning

confidence: 99%

Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch

Chen¹,

Wang²,

Cao³

et al. 2021

J. Micromech. Microeng.

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In this paper, a novel optimization method, in which composed of the genetic algorithm, particle swarm optimization (GA–PSO) and improved gradient descent algorithm, are used to conduct a double-objective optimization for the U-shaped actuator. In the procedure of optimization, two objectives, i.e. force and displacement, and four main sizes are utilized. Before, the deep reactive-ion etch (DRIE) technology is applied to the fabrication of the U-shaped actuator. When different voltages are applied on the actuator, the displacement obtained from numerical calculation always shows a good agreement with that from experiment by edge detection algorithm. Similar phenomenon can be also seen when an external force supplied by the nanoindentation system FemtoTools in the experiment is loaded on the actuator. Based on the validated simulation model of the U-shaped actuator, the improved gradient descent method ensures its displacement very close to 50 µm (target displacement) while the GA–PSO algorithm is used to maximize the output force. In this procedure, the hybrid optimization method implemented by Matlab is incorporated into ANSYS simulation. Preliminary analysis shows that the displacement and force of the particles in each iteration concentrate together with the iteration growing. Fine convergence, whose velocity only depends on the number of particle in the algorithm, is also found in each optimization. Furthermore, the optimized actuators have homologous value of the size variables. At 15 V voltage, the displacement and largest output force of the U-shaped actuator are 2 mN and 50.1 µm, respectively. Finally, an actuator with 30% improvement of the output force is obtained when the displacement condition is meet. According to the optimization result and further parametric scanning simulation analysis, the design range and fabrication error of the sizes of the U-shaped actuator are obtained.

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“…Before the fabrication, the sample (Si) is < 100 > oriented and heavily doped n-type single-crystal silicon wafer, with an electrical resistivity of about 0.04 ohm•cm. Deep reactiveion etch echnology [23,24], in which bonding, etching, and deposition are included, is applied to the fabrication of the Sibased actuator. The experimental setup including the power supply, microscope, camera, and computer, is shown in figure 10.…”

Section: Fem and Experimental Verificationmentioning

confidence: 99%

Analysis of the dynamic behavior of a V-shaped electrothermal microactuator

Chen

Wang

et al. 2020

J. Micromech. Microeng.

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This paper presents an accurate and complete analysis of the dynamic performance of a V-shaped microactuator. This multi-physical coupling analysis is split into two steps: the electro-thermal sub-model for temperature distribution and the thermo-elastic sub-model for displacement. For the electro-thermal sub-model, a combination of the Chebyshev spectral method and the improved Euler method is utilized to predict the thermal dynamic behavior, where a piecewise partial differential equation exists. This method is found to have conditional stability which is dependent on time steps and number of points. Although a one-dimensional geometric model is used in it, the obtained temperature profile hardly shows a difference over time compared with that from the finite element method where a three-dimensional geometric model is established. The method’s calculation time is also sharply reduced. According to the forced vibration theory, the thermo-elastic sub-model is rebuilt regardless of the damping term. When applied to different voltages, the displacement of the actuator at a steady state is validated by an experiment and an ANSYS simulation. Furthermore, the result of the transient displacement also shows a good agreement with the ANSYS simulation.

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Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning

Cited by 10 publications

References 7 publications

Compact Digital Microrobot Based on Multistable Modules

Compact Digital Microrobot Based on Multistable Modules

Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch

Analysis of the dynamic behavior of a V-shaped electrothermal microactuator

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