Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling

Abstract

Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors.

Paper-Based Humidity Sensors as Promising Flexible Devices, State of the Art, Part 2: Humidity-Sensor Performances

“…One (i) is to stabilize the temperature of the sensor, which is an energy-consuming method and increases the size of the measuring device. The other (ii) is to control the temperature, alongside the measurement of the humidity, and to automatically make appropriate corrections to the sensor readings [223,[225][226][227]. The second option seems to be more rational, especially if this task is combined with the development of multifunctional integrated PB sensors.…”

An in-sensor humidity computing system for contactless human–computer interaction

“…1a). [9][10][11][12] The complicated circuit design and system construction require sophisticated integration techniques, 13 which also increase the latency and computing power of the overall system, 14,15 inevitably influencing the efficiency, esthetics, and comfort of the system. [13][14][15][16] Inspired by the biological perception system with a datacentric tactic, in-sensor computing architectures bring an innovative concept to improve the evaluation efficiency of humidity-indicated health management because the sensory data can be locally filtered, memorized, and processed without shuttling.…”

“…1a). 9–12 The complicated circuit design and system construction require sophisticated integration techniques, 13 which also increase the latency and computing power of the overall system, 14,15 inevitably influencing the efficiency, esthetics, and comfort of the system. 13–16…”