“…It is believed that the multi-hit events are mainly associated with potential errors in compositional accuracy resulting from preferential signal loss (Thuvander et al, 2013; Meisenkothen et al, 2015; Peng et al, 2018; Engberg et al, 2019; Cuduvally et al, 2020); however, statistical analysis of ion pairs within multi-hit detector events can yield significant information relating to the compositional biases (Saxey, 2011; Rousseau et al, 2020; Schwarz et al, 2020). Licata et al found that the percentage of multi-hit events increases with increased Al concentration (Al x Ga 1− x N from x = 0 to 1.0), suggesting that the relative field evaporation required for single Al and N ions is higher than the field required to evaporate AlN pairs and that, conversely, the field required to evaporate single Ga and N ions is less than GaN pairs (Licata et al, 2020).…”