Dynamic ellipsometry measurement based on a simplified phase-stable dual-comb system

Zhang, Ruixue; Shi, Liheng; Zhou, Siyu; Zhang, Jinxu; Liu, Bin; Wu, Guanhao

doi:10.1364/oe.453406

Cited by 8 publications

(5 citation statements)

References 49 publications

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“…This can be attributed to the same molecular orientations in HHHH case and the distinct degenerate Zeeman transition pathways compared to the HVVH case. [ 35 ]…”

Section: Resultsmentioning

confidence: 99%

“…This can be attributed to the same molecular orientations in HHHH case and the distinct degenerate Zeeman transition pathways compared to the HVVH case. [35] By performing a second FFT on the phase-corrected spectra along with the accurate time delay 𝜏 1 , the MDCS S 2D (𝜔 s ,𝜔 𝜏 ) of the photon echo of Rb atoms can be obtained, as described by Equations ( 9) and (10). In our proposed scheme, the time-delay information 𝜏 1 can be precisely measured, allowing for determining the global phase of the MDCS.…”

Section: Phase-corrected Mdcs Of Rb Atomsmentioning

confidence: 99%

“…[ 34 ] Subsequently, post‐data processes were implemented to correct the phase fluctuations of MDCS. Highly coherent dual‐comb interferometers have demonstrated their ability to provide phase information across wide spectral ranges and achieve high spectral resolution in various applications, such as ellipsometry, [ 35 ] hyperspectral imaging, [ 36 ] and precise ranging. [ 37 ] Minamikawa et al developed a polarization‐modulation‐free ellipsometry by utilizing dual‐comb interferometers to extract ellipsometric information from birefringent materials and thin‐film samples.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Phase‐Stable Multidimensional Coherent Spectroscopy Based on Dual‐Comb Interferometry

Zuo,

Gu,

Wang

et al. 2024

Advanced Optical Materials

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Multidimensional coherent spectroscopy (MDCS) is a highly intriguing field for the unique capacities to unravel quantum pathways of microscopic dynamics and discern different dipole–dipole interactions. These capabilities are not simultaneously accessible through any other techniques. The foundation of MDCS lies in the stable phase and accurate time information of the multi‐pulse sequences involved. Achieving the phase stability has traditionally relied on ingenious geometric optical designs and multiple feedback control systems, albeit at the cost of complexity. In this letter, a phase stability scheme for high‐resolution MDCS is proposed by replacing traditional laser sources with two highly coherent frequency combs. By employing dual‐comb interferometry, the phase distribution across a broad spectral range and the time information of all the excitation pulses are precisely measured, even in setups that lack phase stability. In the experiment, a rephasing MDCS of rubidium atoms is obtained by applying this approach, wherein the comb resolution is utilized to differentiate the couplings of hyperfine energy levels. This scheme simplifies the structure of MDCS and holds potential for applications in other MDCS systems involving many‐body interactions and non‐absorptive resonances.

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“…This can be attributed to the same molecular orientations in HHHH case and the distinct degenerate Zeeman transition pathways compared to the HVVH case. [ 35 ]…”

Section: Resultsmentioning

confidence: 99%

Section: Phase-corrected Mdcs Of Rb Atomsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Phase‐Stable Multidimensional Coherent Spectroscopy Based on Dual‐Comb Interferometry

Zuo,

Gu,

Wang

et al. 2024

Advanced Optical Materials

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“…1a , requires a cascade of polarization-modulation and spectral detection system. Recently, alternative methods, such as dual-comb spectroscopic ellipsometry 18 , 19 , have been proposed to partially address the abovementioned issues. However, dual-comb spectroscopic ellipsometry may have a limited spectral range for measurement, requires high-cost light sources, and also does not permit single-shot measurements.…”

Section: Introductionmentioning

confidence: 99%

Metasurface array for single-shot spectroscopic ellipsometry

Wen,

Xue,

Wang

et al. 2024

Light Sci Appl

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Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. Most conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for spectropolarimetric detection. Here, we demonstrated a compact metasurface array-based spectroscopic ellipsometry system that allows single-shot spectropolarimetric detection and accurate determination of thin film properties without any mechanical movement. The silicon-based metasurface array with a highly anisotropic and diverse spectral response is combined with iterative optimization to reconstruct the full Stokes polarization spectrum of the light reflected by the thin film with high fidelity. Subsequently, the film thickness and refractive index can be determined by fitting the measurement results to a proper material model with high accuracy. Our approach opens up a new pathway towards a compact and robust spectroscopic ellipsometry system for the high throughput measurement of thin film properties.

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“…Since the polarization state of the reflected light is highly sensitive to thickness changes, this method has nanometer-level measurement accuracy, but its measurement range usually only reaches a few microns. More importantly, since each measurement needs to be changed by a series of parameter conditions, the measurement efficiency of this method is low [11]. The laser triangulation method is a common non-contact thickness measurement method.…”

Section: Introductionmentioning

confidence: 99%

High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry

Zhong,

He,

Deng

et al. 2024

Photonics

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The flatness of semiconductor substrates is an important parameter for evaluating the surface quality of semiconductor substrates. However, existing technology cannot simultaneously achieve high measurement efficiency, large-range thickness measurement, and nanometer-level measurement accuracy in the thickness measurement of semiconductor substrates. To solve the problems, we propose to apply the method that combines spectral-domain optical coherence tomography (SD-OCT) with the Hanning-windowed energy centrobaric method (HnWECM) to measure the thickness of semiconductor substrates. The method can be employed in the full-chip thickness measurement of a sapphire substrate, which has a millimeter measuring range, nanometer-level precision, and a sampling rate that can reach up to 80 kHz. In this contribution, we measured the full-chip thickness map of a sapphire substrate by using this method and analyzed the machining characteristics. The measurement results of a high-precision mechanical thickness gauge, which is widely used for thickness measurement in the wafer fabrication process, were compared with the proposed method. The difference between these two methods is 0.373%, which explains the accuracy of the applied method to some extent. The results of 10 sets of repeatability experiments on 250 measurement points show that the maximum relative standard deviation (RSD) at this point is 0.0061%, and the maximum fluctuation is 71.0 nm. The above experimental results prove that this method can achieve the high-precision thickness measurement of the sapphire substrate and is of great significance for improving the surface quality detection level of semiconductor substrates.

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Dynamic ellipsometry measurement based on a simplified phase-stable dual-comb system

Cited by 8 publications

References 49 publications

Phase‐Stable Multidimensional Coherent Spectroscopy Based on Dual‐Comb Interferometry

Phase‐Stable Multidimensional Coherent Spectroscopy Based on Dual‐Comb Interferometry

Metasurface array for single-shot spectroscopic ellipsometry

High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry

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