Dynamic error analysis for six degrees of freedom micro-displacement mechanism in reticle stage of lithography machine

Luo, Dashuang; Wang, Kesheng; Zhang, Longlong; Li, Jing; Huang, Hong‐Zhong; Liu, Yu

doi:10.1109/qr2mse.2013.6625639

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Cited by 2 publications

(2 citation statements)

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“…The kinematic chain and homogeneous coordinate array approaches have been utilized in modeling the errors in lithography machines. For example, the lithography machine has been designed and optimized in [17] through an error analysis model for the 6-DOF of the reticle stage.…”

Section: Existing Literaturementioning

confidence: 99%

On characterization of a generic lithography machine in a multi-directional space

Al-Rawashdeh

Janaideh

Heertjes

2022

Mechanism and Machine Theory

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Section: Existing Literaturementioning

confidence: 99%

On characterization of a generic lithography machine in a multi-directional space

Al-Rawashdeh

Janaideh

Heertjes

2022

Mechanism and Machine Theory

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“…Briot considered the effects of errors, conducted a detailed theoretical analysis of the 3T1R parallel manipulator, and established the maximum position and maximum orientation error model [6]. Luo established the dynamic error model of a 6-DOF parallel micromanipulator and studied the dynamic accuracy reliability of the mechanism by the Monte Carlo method [7]. Li studied the kinematic accuracy reliability of a 3-DOF 3-PRR parallel manipulator based on the PZT vibration control system.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the Kinematic Accuracy Reliability of a 3-DOF Parallel Robot Manipulator

Cui

Zhang

et al. 2015

International Journal of Advanced Robotic Systems

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Kinematic accuracy reliability is an important performance index in the evaluation of mechanism quality. By using a 3-DOF 3-PUU parallel robot manipulator as the research object, the position and orientation error model was derived by mapping the relation between the input and output of the mechanism. Three error sensitivity indexes that evaluate the kinematic accuracy of the parallel robot manipulator were obtained by adapting the singular value decomposition of the error translation matrix. Considering the influence of controllable and uncontrollable factors on the kinematic accuracy, the mathematical model of reliability based on random probability was employed. The measurement and calculation method for the evaluation of the mechanism's kinematic reliability level was also provided. By analysing the mechanism's errors and reliability, the law of surface error sensitivity for the location and structure parameters was obtained. The kinematic reliability of the parallel robot manipulator was statistically computed on the basis of the Monte Carlo simulation method. The reliability analysis of kinematic accuracy provides a theoretical basis for design optimization and error compensation.

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Dynamic error analysis for six degrees of freedom micro-displacement mechanism in reticle stage of lithography machine

Cited by 2 publications

References 2 publications

On characterization of a generic lithography machine in a multi-directional space

On characterization of a generic lithography machine in a multi-directional space

Analysis of the Kinematic Accuracy Reliability of a 3-DOF Parallel Robot Manipulator

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