2022
DOI: 10.1088/1361-6595/ac9c2b
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Dynamic features of the electron drift and electron properties in a HiPIMS discharge

Abstract: Information on the evolution of electron properties during High-Power Impulse Magnetron Sputtering (HiPIMS) operation of planar magnetrons enables the study of fundamental physical processes. In this work, incoherent Thomson scattering is implemented for the non-invasive, spatiotemporally-resolved characterization of electron properties and drifts in the HiPIMS regime of a planar magnetron. In the ionization region of argon and helium plasmas, the azimuthal electron drifts are directly measured perpendicular t… Show more

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Cited by 5 publications
(11 citation statements)
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“…This means that at a certain distance the cooling mechanism takes over. If the population remains Maxwellian the drifting electron cloud would be characterized by an electron temperature which gradually decreases as it moves away from the target, which has indeed been observed experimentally, as discussed above [12].…”
Section: Spatial Variations Of Tesupporting
confidence: 60%
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“…This means that at a certain distance the cooling mechanism takes over. If the population remains Maxwellian the drifting electron cloud would be characterized by an electron temperature which gradually decreases as it moves away from the target, which has indeed been observed experimentally, as discussed above [12].…”
Section: Spatial Variations Of Tesupporting
confidence: 60%
“…Experimentally, however, usually lower electron temperatures are determined, which is typically explained by the fact that they are measured at some distance from the target surface for various target materials [36][37][38][39][40][41]. Dubois et al [12] applied Thomson scattering measurements and determined the electron temperature to be 1.3 eV at 5 mm from a titanium target surface. This is lower than what has been observed by Langmuir probe measurements at 40 mm and 100 mm away from a titanium target, 3.5 eV [40] and 2 eV [41], respectively.…”
Section: Methodsmentioning
confidence: 99%
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“…However, a recent study suggests that DD approximations may not be valid in case the Hall parameter is large [6], leading to the development of a five-moment full fluid moment (FFM) model that accounts for the inertial terms [8]. Advanced incoherent laser Thomson scattering (LTS) indicates that the electron bulk velocity due to the ⃗ E × ⃗ B drift can be comparable to the electron thermal velocity [23,24], in which case the inertia (e.g. velocity shear) in the azimuthal direction cannot be neglected.…”
Section: Introductionmentioning
confidence: 99%