Dynamic modeling method for air bearings in ultra-precision positioning stages

Bao, Xiulan; Mao, Jingqin

doi:10.1177/1687814016664290

Cited by 6 publications

(7 citation statements)

References 13 publications

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“…In 2016, Bao and Mao [9] proposed an innovative dynamic modeling method for air-bearing systems. In this method, the dynamic characteristics, direction of motion, and support are considered.…”

Section: Of 23mentioning

confidence: 99%

Bifurcation and Nonlinear Behavior Analysis of Dual-Directional Coupled Aerodynamic Bearing Systems

Wang

Lin

2020

Symmetry

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Dual-directional coupled aerodynamic bearing (DCAB) systems have received considerable attention over the past few years. These systems are primarily used to solve air lubrication problems in high-precision mechanisms and equipment that run at a high rotational speed and require high rigidity and precision. DCABs have the advantages of axial and radial thrust and provide high rigidity, dual-directional support, and high load-carrying capacity. In DCAB systems, the nonlinearity of the air film pressure and dynamic problems, such as critical speed, unbalanced air supply, or poor design, can cause the instability of the rotor-bearing system and phenomena such as nonperiodic or chaotic motion under certain parameters or conditions. Therefore, to investigate what conditions lead to nonperiodic phenomena and to avoid irregular vibration, the properties and performance of the DCAB system were explored in detail by using three numerical methods for verifying the accuracy of the numerical results. The rotor behavior was also studied by analyzing the spectral response, the bifurcation phenomenon, Poincaré maps, and the maximum Lyapunov exponent. The numerical results indicate that chaos occurs in the DCAB system for specific ranges of the rotor mass and bearing number. For example, when the rotor mass (mr) is 5.7 kg, chaotic regions where the maximum Lyapunov exponents are greater than 0 occur at bearing number ranges of 3.96–3.98 and 4.63–5.02. The coupling effect of the rotor mass and bearing number was also determined. This effect can provide an important guideline for avoiding an unstable state.

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Section: Of 23mentioning

confidence: 99%

Bifurcation and Nonlinear Behavior Analysis of Dual-Directional Coupled Aerodynamic Bearing Systems

Wang

Lin

2020

Symmetry

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“…After combining with Eqs. (14) and (17) and other modules, a system dynamic accuracy model can be created to analyze the motion errors and the errors of displacement measurement results during system motion, as shown in…”

Section: Measurement Model Of An Interferometermentioning

confidence: 99%

“…For example, Chen et al [10] and Li et al [11] conducted a numerical analysis to investigate the influence of gas slip effects, gas supply pressure, and gap parameters on the bearing capacity characteristics of aerostatic bearings. He and Chen [12], Chen and Li [13], and Bao and Mao [14] established dynamic models of ultra-precision positioning stages, including equivalent models of aerostatic bearings, and analyzed the influence of the stiffness characteristics of aerostatic bearings on the dynamic behavior of the stages. Denkena et al [15] established a finite element (FE) model of an ultraprecision positioning system and applied model order reduction to obtain a state space model for compensating dynamic errors.…”

Section: Introductionmentioning

confidence: 99%

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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

et al. 2019

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Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.

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“…In order to improve the system precision, Bao et al. 3 proposed a novel method for the dynamic modeling of air bearing, and dynamic behaviors of the ultra-precision positioning dual stage were studied and compared with the experimental results to validate the effectiveness and accuracy of the proposed dynamic method. Hosokawa et al.…”

Section: Introductionmentioning

confidence: 99%

An evaluation system of the eccentric orbit of shaft with aerostatic bearing in the microscale

Chen

Han

Dong

et al. 2017

Proceedings of the Institution of Mechanical Engineers, Part J:

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In order to improve the machining precision of the aerostatic bearing, an eccentric rotor orbit model considering the microscale effects is established. A flow factor Q embodying the effects in the microscale is introduced into the fluid control equation, the dynamic stiffness, and damping coefficients of bearing are calculated considering the microscale effects. According to the actual working condition of the shaft, the modal analysis in both cases (with and without the microscale effects) is performed. And with the modal information, the dynamic orbit in both states (with and without the microscale effects) is described by the deduced orbit model of the shaft system. Finally, experiments of the frequency by LMS vibration test system and shaft orbit by displacement sensor are measured, and the results indicate that the simulated results considering the microscale effects are more similar with the actual experimental one, which provides a guideline and evaluation standard for further optimization design and precision control of the shaft system.

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Dynamic modeling method for air bearings in ultra-precision positioning stages

Cited by 6 publications

References 13 publications

Bifurcation and Nonlinear Behavior Analysis of Dual-Directional Coupled Aerodynamic Bearing Systems

Bifurcation and Nonlinear Behavior Analysis of Dual-Directional Coupled Aerodynamic Bearing Systems

Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

An evaluation system of the eccentric orbit of shaft with aerostatic bearing in the microscale

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