2019
DOI: 10.1109/access.2019.2909657
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Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control

Abstract: In this paper, we propose a novel coordinated control method based on decoupling servo control to design a 4-DOF direct-drive SCARA robot for wafer handling purpose. As the basis of decoupling servo control, the dynamic model of the SCARA robot is obtained with two methods, the Newton-Euler equation, and Lagrangian equation. The validity of this SCARA dynamic equation is confirmed by these two methods. Due to disturbance and model uncertainty, three PD plus robust controllers are individually applied to three … Show more

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Cited by 21 publications
(15 citation statements)
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“…The purpose of dynamic modelling is to predict the force and torque behaviour of the robot system with various payloads conditions [18]. From the dynamic modelling, the required torque, joint velocity, joint acceleration and joint position of the SCARA robot can be calculated and used as a reference to select a suitable actuator and transmission system [14], [19]. To design control systems, it is possible to apply the mathematical dynamic model of the SCARA robot arm's dynamic behaviour.…”
Section: B Dynamic Modellingmentioning
confidence: 99%
See 1 more Smart Citation
“…The purpose of dynamic modelling is to predict the force and torque behaviour of the robot system with various payloads conditions [18]. From the dynamic modelling, the required torque, joint velocity, joint acceleration and joint position of the SCARA robot can be calculated and used as a reference to select a suitable actuator and transmission system [14], [19]. To design control systems, it is possible to apply the mathematical dynamic model of the SCARA robot arm's dynamic behaviour.…”
Section: B Dynamic Modellingmentioning
confidence: 99%
“…Therefore, the Neural Network consumes time and data set to train the algorithm to achieve desired performance. The well-trained Neural Network which is known as the mature algorithm can achieve better precise control compared to PID Controller [19]. The mature algorithm used estimation of position and motion error to actively tune the PID gain in dealing with the non-linear behaviour of the SCARA robot dynamic [29].…”
Section: A Ai Controlmentioning
confidence: 99%
“…In the process of decoupling electro-hydraulic composite braking design, to make the vehicle stable, it is necessary to implement a braking force distribution control strategy that is restricted by regulations, electric motors, and battery pack characteristics [18]. In addition to the abovementioned constraints, the electric motor and battery pack also have a certain constraint on the system.…”
Section: Braking Force Distribution and Control Strategymentioning
confidence: 99%
“…During the past decades, there have been many typical algorithms to build up the accurate tracking performance of robot system, such as proportional-integral-derivative (PID) control [3]- [5], robust control [6], [7], sliding mode control [8], [9], adaptive control [10]- [12], fuzzy control [13], [14], genetic algorithm and particle swarm optimization [15], [16] and so on. Each algorithm has its advantage and limitation.…”
Section: Introductionmentioning
confidence: 99%