2019
DOI: 10.3390/s19071585
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Dynamic pH Sensor with Embedded Calibration Scheme by Advanced CMOS FinFET Technology

Abstract: In this work, we present a novel pH sensor using efficient laterally coupled structure enabled by Complementary Metal-Oxide Semiconductor (CMOS) Fin Field-Effect Transistor (FinFET) processes. This new sensor features adjustable sensitivity, wide sensing range, multi-pad sensing capability and compatibility to advanced CMOS technologies. With a self-balanced readout scheme and proposed corresponding circuit, the proposed sensor is found to be easily embedded into integrated circuits (ICs) and expanded into sen… Show more

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Cited by 5 publications
(2 citation statements)
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“…Specifically, α SG becomes more effective as L SG lengthens, thereby inducing more potential for the FG and increase the output response. For the FG coupling structure, it is a key for the high output sensitivity, with which the sensitivity of the proposed ion sensor can be described by the following equations [ 31 ] VFG=αSG ×normalΨ0+αRG×VRG+QCtotal, FG ΔVOUTΔpH=ΔVRGΔpH =αSGαRG normalΔΨ0normalΔpH unit: mVpH …”
Section: Resultsmentioning
confidence: 99%
“…Specifically, α SG becomes more effective as L SG lengthens, thereby inducing more potential for the FG and increase the output response. For the FG coupling structure, it is a key for the high output sensitivity, with which the sensitivity of the proposed ion sensor can be described by the following equations [ 31 ] VFG=αSG ×normalΨ0+αRG×VRG+QCtotal, FG ΔVOUTΔpH=ΔVRGΔpH =αSGαRG normalΔΨ0normalΔpH unit: mVpH …”
Section: Resultsmentioning
confidence: 99%
“…At this point, the underlying formula of the intelligent atmospheric pressure sensor is completed. Table 1 shows the meaning of each symbol in the above formula, wherein the units have been converted to an international common unit [31].…”
Section: Wireless Communications and Mobile Computingmentioning
confidence: 99%