This chapter presents the rate-dependent hysteresis compensation of a piezoelectric nanopositioning stage using the feedforward control based on an inverse hysteresis model. Three different controllers are realized and compared, which employ Bouc-Wen model, modified Prandtl-Ishlinskii (MPI) model, and least squares support vector machines (LSSVM)-based intelligent model, respectively. Experimental studies demonstrate the superiority of LSSVM model in hysteresis modeling and compensation tasks.
IntroductionIn order to compensate for the hysteresis effect, the hysteresis behavior is usually modeled by Preisach model [3,6], Prandtl-Ishlinskii model [7], Bouc-Wen model [11,12], Maxwell-based model [8], Dahl model [18], polynomial model [9], etc. Then, an inverse hysteresis model is constructed and utilized as a feedforward controller to cancel the hysteresis effect. However, the hysteresis effect is dependent not only on the amplitude but also on the frequency of input signals. It is very difficult to capture the complicated rate-dependent hysteretic behavior precisely. In addition, majority of the existing models employ a large number of parameters to describe the rate-dependent hysteresis [1,21], which may block their applications in high-speed real-time control as an adverse effect.Recently, it has been shown that ANN provides an efficient way to model the nonlinear hysteresis [5,20]. Nevertheless, there is no universal method to determine an optimal ANN structure in terms of the number of hidden layers and number of neurons in each layer. Moreover, ANN exhibits the problems of overfitting and sinking into local optima, which are their major drawbacks in practical implementation. Alternatively, SVM gives a promising way to estimate nonlinear system models accurately. Based on the statistical learning theory and structural risk minimization principle, the SVM approach is capable of modeling nonlinear systems by trans-