2000
DOI: 10.1109/16.861580
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Dynamic range improvement by narrow-channel effect suppression and smear reduction technologies in small pixel IT-CCD image sensors

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Cited by 8 publications
(2 citation statements)
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“…At shorter wavelengths, reducing the thickness of the photodiode’s p+ pinning layer reduces smear. This is because as the quasi-neutral region in the pinning layer is made thinner, there will be fewer photoelectrons generated there that can subsequently diffuse into the VCCD [ 10 ]. From earlier work on other devices without the MeV implants, we anticipated an improvement of blue smear between 2 and 5 dB, without any measureable difference in green, red, or NIR smear from the thinner pinning and shallow n-type photodiode implants.…”
Section: Reduced Image Smearmentioning
confidence: 99%
“…At shorter wavelengths, reducing the thickness of the photodiode’s p+ pinning layer reduces smear. This is because as the quasi-neutral region in the pinning layer is made thinner, there will be fewer photoelectrons generated there that can subsequently diffuse into the VCCD [ 10 ]. From earlier work on other devices without the MeV implants, we anticipated an improvement of blue smear between 2 and 5 dB, without any measureable difference in green, red, or NIR smear from the thinner pinning and shallow n-type photodiode implants.…”
Section: Reduced Image Smearmentioning
confidence: 99%
“…Smear is due to both electrical and optical effects. Its main cause is a lateral diffusion of charges between the photosensor and the CCD shift register, but it is also caused by light piping underneath or directly through the light shields that may cover these registers . Although interpixel capacitance and smear are caused by different physical processes related to two different technology platforms (hybrid CMOS and CCD, respectively), they are jointly symbolized here by one coupling capacitance C c .…”
Section: Introductionmentioning
confidence: 99%