We present a study of strain relaxation mechanisms in epitaxial c-axis YBa2Cu3O7¡¯(YBCO) ®lms deposited on SrTiO3 (STO) and LaAlO3 (LAO). A combination of high-resolution transmission electron microscopy and electron back-scattered diOE raction in scanning electron microscopy has shown that a considerable amount of 908 tilted small domains exist in ®lms grown on LAO while only planar and/or linear defects are observed in strain-relaxed ®lms on STO. The 908 tilted domains, which have very limited in¯uence on the superconducting characteristics of YBCO, account for the full relief of epitaxial strain in ®lms on LAO. As the strain relaxation originated from diOE erent stages of the ®lm deposition, this study may also explain the diOE erent crystalline qualities, surface morphologies, and some of the transport properties of YBCO ®lms on STO and LAO.