2018
DOI: 10.1177/0959651818780866
|View full text |Cite
|
Sign up to set email alerts
|

Dynamic vacuum pressure tracking control with high-speed on-off valves

Abstract: A vacuum pressure tracking system with high-speed on-off valves is a discontinuous system due to the discrete nature of high-speed on-off valves. Chamber pressure changes in the system are determined by the mass flow rates during the processes of charging and discharging. Here, a sliding mode controller with an asymmetric compensator based on average mass flow rate is designed for accurate vacuum pressure tracking. The controller output signal is converted into the duty cycles of the high-speed on-off valves v… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
5
0

Year Published

2020
2020
2024
2024

Publication Types

Select...
6
1

Relationship

1
6

Authors

Journals

citations
Cited by 9 publications
(5 citation statements)
references
References 31 publications
0
5
0
Order By: Relevance
“…The multiple-valve structure of the discharging unit can thus satisfy the requirement of choosing the combination modes of the flow area, and thereby enable the flexible optimization of the balance between charging and discharging abilities by the controller. Due to the limitation of the pumping ability of the vacuum pump, the chamber pressure change rate in curve 6 is approximately equal to that recorded in curve 5 [23].…”
Section: Figure 2 Experimental Results Of System Charging and Dischamentioning
confidence: 82%
See 1 more Smart Citation
“…The multiple-valve structure of the discharging unit can thus satisfy the requirement of choosing the combination modes of the flow area, and thereby enable the flexible optimization of the balance between charging and discharging abilities by the controller. Due to the limitation of the pumping ability of the vacuum pump, the chamber pressure change rate in curve 6 is approximately equal to that recorded in curve 5 [23].…”
Section: Figure 2 Experimental Results Of System Charging and Dischamentioning
confidence: 82%
“…However, these studies used the expensive proportional/servo valve as the control element of the vacuum servo system. Accordingly, Gang Yang et al [23] designed a dynamic vacuum pressure tracking system with HSVs that adopted SMC strategy to improve the performance and robustness of control for accurate dynamic vacuum tracking a sinusoidal signal with a frequency of 2Hz. However, the above research can only achieve tracking control with low frequency (≤2Hz) pneumatic pressure [21]- [23].…”
Section: Introductionmentioning
confidence: 99%
“…In Refs. [68,69], a negative pressure servo system, which is based on parallel HSVs and consists of a charging unit and a discharging unit, was designed. To eliminate the influences of operating points on the characteristics of the charging unit and discharging unit, an asymmetric compensation control algorithm of the PWM signal was proposed to achieve high-accuracy tracking at different frequencies and different pressures.…”
Section: Single Coding Control Strategy 411 Pwm Controlmentioning
confidence: 99%
“…In previous publications [15,22,23], the values of the initial duty cycles were all selected as 0.5. This is because when the initial duty cycle is 0.5, the output flow rates of the two HSVs are the same, and better linearity of the flow rate is obtained.…”
Section: Asymmetric Pressure Difference Compensation (Apdc)mentioning
confidence: 99%
“…In Ref. [22], an asymmetric structure comprising one HSV in the charging unit and three HSVs in the discharging unit were used to control the pressure in one chamber. In the research, a sliding mode controller with an asymmetric compensator was proposed to achieve high precision tracking of vacuum pressure.…”
Section: Introductionmentioning
confidence: 99%