Dynamic Wavefront Evaluation in Phase Shifting Interferometry Based on Recurrence Fringe Processing

Abstract

The method of recovering 3D unwrapped phase distribution in phase shifting interferometry is investigated. The method is based on dynamic recurrence processing of a set of fringe patterns involving the Kalman filtering algorithm with 3D spatial-temporal prediction of fringe parameters. The advantage of the suggested algorithm consist in dynamic evaluation of wavefront full phase with highest phase accuracy at the last phase shift step.

Recursion algorithms for processing video information in optical-coherence-tomography systems

“…(15), is the extended-Kalman-filtering algorithm, successfully used for processing the interferometric signals in the microprofilometer, 9 for OCT 10 when analyzing two-dimensional interference-fringe patterns, 11 and in controllable-phase-shift interferometry when scanning the phase of the wave front. 12 The extended-Kalman-filtering algorithm is quasioptimal, because it uses linearization of the observation function given by Eq. (15).…”

“…Moreover, the use of derivatives up to the second order makes it possible to correctly determine the sign of the interference-fringe frequency (i.e., whether the phase is increasing or decreasing), and this is extremely important when solving phase-scanning problems. 12 A detailed description of the algorithm is given in Ref. 15.…”

A Multi-view Profilometry System Using RGB Channel Separated Fringe Patterns and Unscented Kalman Filter

“…Recursive Bayesian estimation has also been used before in interference fringe analysis [7][8][9][10]. Gurov, Ermolaeva and Zakhrov [7] used a Kalman filter to analyse low-coherence fringes in an interferometry system, however this method still required phase unwrapping, and was only tested on surfaces with up to 100μm.…”