Dynamical Modeling and Simulation of a Laser-micromachined Vibration-based Micro Power Generator

Li, Wen J.; Chan, Gordon; Ching, Neil N.H.; Leong, Philip H. W.; Wong, Hiu Yung

doi:10.1515/ijnsns.2000.1.s1.345

Cited by 7 publications

(3 citation statements)

References 3 publications

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“…Fabrication of such power sources using MEMS technology is attractive in order to achieve small size and high precision. Vibration-driven generators based on electromagnetic [4]- [7], electrostatic [8]- [10] or piezoelectric technologies [11], [12] have been demonstrated. While some of the reported generators have already been fabricated using MEMS techniques [7], [8], [10], [11], others have been made on a mesoscale with the intention of later miniaturizing the devices using MEMS [6], [13].…”

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confidence: 99%

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Architectures for Vibration-Driven Micropower Generators

Mitcheson

Green

Yeatman

et al. 2004

J. Microelectromech. Syst.

641

387

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Abstract-Several forms of vibration-driven MEMS microgenerator are possible and are reported in the literature, with potential application areas including distributed sensing and ubiquitous computing. This paper sets out an analytical basis for their design and comparison, verified against full time-domain simulations. Most reported microgenerators are classified as either velocity-damped resonant generators (VDRGs) or Coulomb-damped resonant generators (CDRGs) and a unified analytical structure is provided for these generator types. Reported generators are shown to have operated at well below achievable power densities and design guides are given for optimising future devices. The paper also describes a new class-the Coulomb-force parametric generator (CFPG)-which does not operate in a resonant manner. For all three generators, expressions and graphs are provided showing the dependence of output power on key operating parameters. The optimization also considers physical generator constraints such as voltage limitation or maximum or minimum damping ratios. The sensitivity of each generator architecture to the source vibration frequency is analyzed and this shows that the CFPG can be better suited than the resonant generators to applications where the source frequency is likely to vary. It is demonstrated that mechanical resonance is particularly useful when the vibration source amplitude is small compared to the allowable mass-to-frame displacement. The CDRG and the VDRG generate the same power at resonance but give better performance below and above resonance respectively. Both resonant generator types are unable to operate when the allowable mass frame displacement is small compared to the vibration source amplitude, as is likely to be the case in some MEMS applications. The CFPG is, therefore, required for such applications.[944]

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“…• Li et al of the Chinese University of Hong Kong have constructed and tested a MEMS electromagnetic VDRG [7]. They generate 40 from an 80-Hz 200-input vibration.…”

mentioning

confidence: 99%

Architectures for Vibration-Driven Micropower Generators

Mitcheson

Green

Yeatman

et al. 2004

J. Microelectromech. Syst.

641

387

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“…Using ANSYS to simulate the resonating structures, it was found that springs with spiral geomehy have lower spring constant and stress concentration than other designs, such that a larger displacement can be obtained [7]. We have used a Q-switch Nd:YAG (1.06pm wavelength) laser to micromachine the spiral resonating spring as shown in Using laser-micromachining to fabricate the copper spring is direct, fast, hut the cutting resolution is not ideal (see Figure 3h).…”

Section: Design Of Resonating Structurementioning

confidence: 99%

AA size micro power conversion cell for wireless applications

Yuen

Lee

Luk

et al.

Fifth World Congress on Intelligent Control and Automation (IEEE Cat. No.04EX788)

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This paper presents the preliminary design and experimental results of a standard AA size vibration-induced micro energy transducer which is integrated with a -power-management circuit. The transducer is a spring mass system which uses SU-8 molding and MEMS electroplating technologies fabricated copper springs to convert mechanical energy into electrical power by Faraday's Law of Induction. We have shown that when the MPG is packaged into an AA battery size container along with a power-management circuit that consists of rectifiers and a capacitor, it is capable of producing -1.6V DC when charged for less than Imin. Potential applications for this micro power generator to serve as a power supply for a wireless temperature sensing system was proved to be possible with input frequencies at about IOOHz and amplitudes be approximately 250microns.

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