Dynamics of monodisperse micrometre-sized metal droplets at low non-dimensional wavenumbers

Sanders, Alexander; Ghorr, Mario Nakhle dit el; Abhari, Reza S.

doi:10.1016/j.expthermflusci.2017.03.024

Cited by 6 publications

(2 citation statements)

References 39 publications

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“…The operating frequency of DG was obtained by impedance scanning in the frequency domain. Sufficient strong excitation is necessary for the generation of even-spaced droplets [16]. As shown in figure 2(a), the resonance frequencies of DG are located at 19.2 kHz, 24.4 kHz, 28.8 kHz, 34.3 kHz, 43.1 kHz, 46.3 kHz, and 48.9 kHz, where the impedance reaches minima.…”

Section: Tin Droplet Generator (Dg)mentioning

confidence: 99%

“…Under this background, it puts high requirements on the uniformity and stability of tin droplets. Methods such as laser probe [16,17], shadowgraph [18], schlieren [19], interferometry [20], and diffraction [21] are used to characterize droplets. Among these, shadowgraph is a simple and intuitive technology, very suitable for the diagnosis of droplet stability.…”

Section: Introductionmentioning

confidence: 99%

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Characteristics of tin droplet target system for EUV source research

Sun,

Wang,

Zuo

2023

Meas. Sci. Technol.

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Droplet-based laser-produced plasma source shows enormous significance in extreme ultraviolet lithography, which places high demands on the stability of tin droplets. This paper presents a tin droplet target system including the tin droplet generator (DG), droplet diagnosis, and spatiotemporal synchronization of tin droplets and laser. Shadowgraph technology is used to determine the stability of tin droplets. The characteristics of the DG were analyzed, and the operation parameter maps are provided. By varying operating frequencies from 18.4 kHz to 49.3 kHz, the diameter and spacing of droplets can be adjusted in the ranges of 120–200 μm and 200–1100 μm respectively. Both theoretical calculations and experimental results show that tin droplets keep high stability when the operation parameters locate at the optimal range. The long-term lateral stability is also proven under a high degree of vacuum. Additionally, the application feasibility of the DG system is verified by the experiments of laser impact tin droplets.

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Section: Tin Droplet Generator (Dg)mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Characteristics of tin droplet target system for EUV source research

Sun,

Wang,

Zuo

2023

Meas. Sci. Technol.

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Elimination of satellite droplets in droplet streams by superposing harmonic perturbations

Lyu,

Luo,

Dou

et al. 2024

International Journal of Mechanical Sciences

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Timing jitter of monodisperse droplets generated by capillary jet breakup

She

Fang

et al. 2022

Physics of Fluids

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Uniform droplets generated by Rayleigh breakup of liquid jet are widely applied in science and engineering. The droplets are produced by imposing a periodic velocity perturbation on a micro-sized liquid jet. In practical situations, the frequency of droplet generation is not perfectly steady like the preset perturbation frequency. This unwanted timing jitter poses kinds of problems. We studied the fluid mechanism of the jitter at short working distance and its dependence on various parameters. We found that at short distance, the jitter is mainly affected by the reduction rather than the dispersion in the droplet velocity. The magnitude of the jitter is related to the velocity reduction and the unsteadiness of the perturbation. The velocity difference between the droplet and the jet is analytically obtained based on one-dimensional linear analysis of drop formation in liquid jet, and numerical simulations validate the results. The influence of the unsteady perturbation is explained by the evolution of control volumes with different initial amplitudes. The degree of jitter is finally deduced, and its relationships with each variable are compared with experiments. Optimization methods are given to mitigate jitter by adjusting the perturbation parameters and jet properties.

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Dynamics of monodisperse micrometre-sized metal droplets at low non-dimensional wavenumbers

Cited by 6 publications

References 39 publications

Characteristics of tin droplet target system for EUV source research

Characteristics of tin droplet target system for EUV source research

Elimination of satellite droplets in droplet streams by superposing harmonic perturbations

Timing jitter of monodisperse droplets generated by capillary jet breakup

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