2015
DOI: 10.1016/j.photonics.2014.11.003
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E-Beam lithography designed substrates for surface enhanced Raman spectroscopy

Abstract: Surface Enhanced Raman Spectroscopy (SERS) is a popular method that amplifies weak Raman signals from Raman-active analyte molecules making use of certain specially-prepared metallic surfaces. The main challenge in SERS is to design and fabricate highly repeatable, predictable, and sensitive substrates. There are many fabrication methods that strive to achieve this goal, which are briefly summarized in this paper. The E-beam lithography method is proposed to be superior to the mentioned techniques. In this pap… Show more

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Cited by 39 publications
(24 citation statements)
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“…Most of the research to fabricate SERS-based chips focuses on optimizing the surface of substrates through nanomaterials and nanostructures synthesized using sophisticated techniques such as lithographic patterning or high-temperature processes [16,[19][20][21][22]. Other research groups deposit Au/Ag nanoparticles on papers [23][24][25] or coat metal on a Si nanowire structure [26] to make a porous SERS substrate suitable for biological or liquid samples.…”
Section: Nanorod Manufacturing Methodsmentioning
confidence: 99%
“…Most of the research to fabricate SERS-based chips focuses on optimizing the surface of substrates through nanomaterials and nanostructures synthesized using sophisticated techniques such as lithographic patterning or high-temperature processes [16,[19][20][21][22]. Other research groups deposit Au/Ag nanoparticles on papers [23][24][25] or coat metal on a Si nanowire structure [26] to make a porous SERS substrate suitable for biological or liquid samples.…”
Section: Nanorod Manufacturing Methodsmentioning
confidence: 99%
“…Electron-beam lithography techniques have also been used to create SERS substrates [ 22 , 103 , 104 , 105 , 106 , 107 , 108 , 109 , 110 ]. Figure 10 shows a schematic describing two fabrication processes typically used to prepare nanostructured SERS substrates [ 106 ].…”
Section: Resultsmentioning
confidence: 99%
“…The primary advantage of electron-beam lithography over other methods used to create SERS substrates is that it can draw custom patterns with sub-10 nm resolution. This capability is important in the fabrication of SERS substrates due to the fact that the localized surface plasmons (LPS) responsible for the SERS effect greatly depend on the size, shape, and arrangement of nanostructures [ 103 , 104 , 105 , 106 ].…”
Section: Resultsmentioning
confidence: 99%
“…Various metal films and fabrication techniques are used for this purpose: physical vacuum deposition (PVD) [20,21], electrochemical deposition from the solution [22][23][24], deposition from a colloidal solution of nanoparticles [25][26][27][28], electron-beam lithography [29,30], plasma-chemical lithography [31]. All the recently used metal thin films and surfaces for SERS-based sensorics usually based on already known general principles of creating surfaces for the successful registration of the giant Raman spectra [32].…”
Section: Introductionmentioning
confidence: 99%