“…Such actuators can convert electrical energy into mechanical energy under an electric field and produce precision mechanical displacement [1][2][3]. High precision micro-drive and micro-positioning technology are needed in the technical fields of optical engineering [4], microelectronic manufacturing [5], aerospace [6], ultra-precision manufacturing [7], micro-robotics [8,9], medicine and genetic engineering [10,11]. Precision actuators with a piezoelectric component as the core show micro/nano displacement resolution.…”