“…Such surfaces are of importance for controlled deposition of nanoobjects, for applications in biology, or sensors. In this context, polymers deposited by plasma polymerization have proved to be relevant since they present the following inherent advantages: i) the plasmachemical surface functionalization step is substrate-independent (Boening, 1988), ii) the plasma polymer thin film provides a good adhesion with most of the substrates (Roucoules et al, 2007), iii) the surface density of immobilized molecular species can be finely tuned by varying the pulsed plasma duty cycle (Teare et al, 2002;Oye et al, 2003) and iv) the plasma polymerization step is easily scaled up to industrial dimension (Yasuda & Matsuzawa, 2005). It was recently demonstrated that Deep-UV lithography could be used to generate topography patterns at the surface of maleic anhydride-based plasma polymers with typical dimension down to 75 nm .…”