Edge effect modeling and experiments on active lap processing

Liu, Haitao; Wu, Fan; Zeng, Zhige; Fan, Bin; Yongjian, Wan

doi:10.1364/oe.22.010761

Cited by 19 publications

(5 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As seen in the graph, it is clear that the distribution of the two TIFs' Figure 2a shows the motion analysis of the spin-polishing, whose total speed V is equal to the tool's spin speed V 2 , as shown in Equation (4). Combining Equations ( 1) and ( 4), the TIF of spin-polishing can be obtained, as shown in Equation (5). Figure 2b shows the TIF simulation of the spin-polishing.…”

Section: R(x Y)mentioning

confidence: 99%

“…However, as with micro-milling, the further development of CCOS is severely limited by the edge effect in the processing [1][2][3]. The edge effect is mainly caused by two reasons: first, the edge area of the workpiece cannot be reached by the orbital motion of the polishing disc; and second, the non-linear variation of the pressure at the edge of the workpiece leads to the inaccuracy of the tool influence function (TIF) [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

“…A new edge pressure model is developed based on the results of finite element analysis. The basic pressure distribution can be calculated based on the surface shape of the polishing pad, a correction function is used to compensate for the errors caused by edge effects, and the edge TIF with different overhang rates can be accurately predicted [5,10]. Surveys such as that conducted by W. Song [11] have shown that the generalized spatial variable deconvolution algorithm can accurately calculate the dwell time, which can better control the actual removal amount so as to effectively suppress the edge error and improve the convergence rate.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Edge Control in the Computer-Controlled Optical Surface

Yin

Guan

et al. 2021

Micromachines

View full text Add to dashboard Cite

The computer-controlled optical surface (CCOS) can process good optical surfaces, but its edge effect greatly affects its development and application range. In this paper, based on the two fundamental causes of the CCOS’s edge effect—namely the nonlinear variation of edge pressure and the unreachable edge removal—a combined polishing method of double-rotor polishing and spin-polishing is proposed. The model of the combined polishing method is established and theoretically analyzed. Combined with the advantages of double-rotor polishing and spin-polishing, the combined polishing process can achieve full-aperture machining without pressure change. Finally, the single-crystal silicon sample with a diameter of 100 mm is polished by the combined polishing process. The results show that, compared with the traditional CCOS polishing, the residual error of the sample after the combined polishing process is more convergent, and the edge effect is effectively controlled.

show abstract

Section: R(x Y)mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Edge Control in the Computer-Controlled Optical Surface

Yin

Guan

et al. 2021

Micromachines

View full text Add to dashboard Cite

show abstract

“…Traditional opticians need to balance working parameters for various kinds of tools and workpieces to ensure a good clear aperture. Based on previous research results [6][7][8][9][10][11], the edge effect includes two parts:…”

Section: Introductionmentioning

confidence: 99%

Edge control in a computer controlled optical surfacing process using a heterocercal tool influence function

Hu¹,

Zhang²,

Ford³

et al. 2016

Opt. Express

View full text Add to dashboard Cite

Edge effect is regarded as one of the most difficult technical issues in a computer controlled optical surfacing (CCOS) process. Traditional opticians have to even up the consequences of the two following cases. Operating CCOS in a large overhang condition affects the accuracy of material removal, while in a small overhang condition, it achieves a more accurate performance, but leaves a narrow rolled-up edge, which takes time and effort to remove. In order to control the edge residuals in the latter case, we present a new concept of the 'heterocercal' tool influence function (TIF). Generated from compound motion equipment, this type of TIF can 'transfer' the material removal from the inner place to the edge, meanwhile maintaining the high accuracy and efficiency of CCOS. We call it the 'heterocercal' TIF, because of the inspiration from the heterocercal tails of sharks, whose upper lobe provides most of the explosive power. The heterocercal TIF was theoretically analyzed, and physically realized in CCOS facilities. Experimental and simulation results showed good agreement. It enables significant control of the edge effect and convergence of entire surface errors in large tool-to-mirror size-ratio conditions. This improvement will largely help manufacturing efficiency in some extremely large optical system projects, like the tertiary mirror of the Thirty Meter Telescope. References and links1. V. Rupp, "The development of optical surfaces during the grinding process,"

show abstract

“…The aim of precession is to achieve better surface texture and avoid zero removal in the center of the tool influence function. To date, researches on bonnet polishing were almost focused on the fields of removal function, 15–17 process control, 18,19 polishing parameters, 20 edge effects, 21 and so on. Few attentions were paid to explore the effects of precession mechanism error on the polishing quality.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Effects of precession mechanism error on polishing spot for bonnet polishing

Wang

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part B:

View full text Add to dashboard Cite

In this article, a research was conducted on the effects of the precession mechanism error on polishing spot, and it is helpful for optimizing the mechanism. In the research, an error model was built to analyze the error caused by gravity and polishing force on the accuracy of the mechanism, finite element analysis and MATLAB simulation were carried out based on the error model to estimate the effects, and, finally, an experiment was conducted to test the simulation result. It was found that the precession mechanism error mainly has an influence on the position of polishing spot in x and y directions. Simulation results show the position error up to 2698.7 mm in y direction and 288.5 mm in z direction under free condition, while in polishing process, the error decreased 588.4 mm in y direction and 26.7 mm in z direction. The size of single polishing spot decreased 2.67%, while the size of four-step tilted polishing spot and continuous polishing spot increased 0.66% and 6.78%, respectively. Through experiment, it can be seen that the size of the polishing spot is also affected by the inflation pressure in bonnet tool, rigidity of bonnet tool, tool clamping error, and mechanism processing error.

show abstract

Edge effect modeling and experiments on active lap processing

Cited by 19 publications

References 14 publications

Edge Control in the Computer-Controlled Optical Surface

Edge Control in the Computer-Controlled Optical Surface

Edge control in a computer controlled optical surfacing process using a heterocercal tool influence function

Analysis of Effects of precession mechanism error on polishing spot for bonnet polishing

Contact Info

Product

Resources

About