In recent years, the development of nano materials has garnered significant attention due to their unique properties and potential applications in various fields. However, the influence of process parameters on the size and properties of these materials remains a complex and largely unexplored area of research. In this study, we systematically investigate the effects of process parameters such as temperature, pressure, and reaction time on the size and properties of nano materials synthesized via a chemical vapor deposition (CVD) method. Using advanced characterization techniques, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD), we analyze the morphology, size distribution, and crystal structure of the synthesized nano materials. Our results reveal a strong correlation between the process parameters and the size of the nano materials, with temperature and pressure being the most influential factors. Furthermore, we observe a significant impact of the process parameters on the mechanical, thermal, and electrical properties of the nano materials. These findings provide valuable insights into the optimization of process parameters for the synthesis of nano materials with tailored properties, paving the way for their application in diverse fields such as electronics, energy storage, and catalysis. Our study contributes to the fundamental understanding of the relationship between process parameters and the properties of nano materials, offering a comprehensive framework for the design and synthesis of nano materials with desired characteristics.