EEDF Measurements in the Diffusion‐extraction Region of a Plasma in ARIS (Applied Radio‐frequency Ion Source)

Abstract

In plasma systems used for H− /D − extraction, a magnetic "filter-field" is created parallel to the extraction plate. The spatial development of the EEDF and the plasma chemistry as the plasma diffuses through this region is of primary interest. In the ARIS apparatus electrostatic probes are used to measure the spatially resolved EEDF resulting from a plasma diffusing through a multi-line magnetic field. Measurements are made with a single Langmuir probe, using the AC superposition method. Calculation of the EEDF follows from the Druyvesteyn analysis. The "temperature" of the high-energy component of the EEDF is compared to results from double Langmuir probes.

Collisionless electron power absorption in capacitive radio-frequency plasma sheaths

“…A more complete description of the reactor is given elsewhere. 10 The mounting of the electrode and biasing circuit is also shown in Fig. 1.…”