Effect and Effect Principle Modeling of Microcomponent

Abstract

For the characteristic of cross-coupled multi-disciplinary research of microcomponent effect plays an important role in the MEMS system. The combination of different effects has the different component principle, then forms the different functional device, completes the different functions. Effect and effect principle modeling of microcomponent in conceptual design for microcomponent are introduced. The effect classification of microcomponent, formal description of effect, the relationship between effect and principle and function decomposing and the mapping between effect and function are described, and the effect model for microcomponent is established. The model is the basis of microcomponent conceptual design solution.