Effect of 2-Mercapto-1-methylimidazole on the Dual Action of Chemical Mechanical Polishing of Cu and Ta

Chen, Xuhua; Wang, Ru; Du, Zhanjie; Zhu, Yu; Liang, Zhe; Dong, Yanwei; Zheng, Tao

doi:10.1021/acs.langmuir.4c03686

Langmuir

2024

DOI: 10.1021/acs.langmuir.4c03686

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Effect of 2-Mercapto-1-methylimidazole on the Dual Action of Chemical Mechanical Polishing of Cu and Ta

Xuhua Chen,

Ru Wang,

Zhanjie Du

et al.

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Effect of 2-Mercapto-1-methylimidazole on the Dual Action of Chemical Mechanical Polishing of Cu and Ta

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References 67 publications

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