Abstract:In this paper, we present the effects of high-energy Ni++ ion irradiation on the structural and optical properties of GaN films. Three different irradiation doses of 10 13 , 10 14 , and 10 15 ions/cm 2 were used while keeping the ion energy at 700keV. The irradiation induced structural and optical changes in GaN films were measured using X-ray diffraction (XRD) and UV-Vis spectroscopy. The XRD measurements on irradiated films discovered several extra peaks in the XRD spectrum compared with the as-grown GaN fil… Show more
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