The breakaway oxidation of Zircaloy-4 and M5Framatome alloys oxidized in flowing steam around 1000°C was studied. The influences of oxidation temperature between 950 and 1050°C, oneside versus two-side oxidation and chemical variations around the nominal composition of M5Framatome were investigated. Breakaway oxidation is sensitive to the oxidation temperature, the material and the oxidation type. A phenomenological mechanism for breakaway oxidation is postulated on the basis of microstructural and microchemical analyses.