2010
DOI: 10.1016/j.matchemphys.2010.07.012
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Effect of annealing and argon-to-oxygen ratio on sputtered SnO2 thin film sensor for ethylene gas detection

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Cited by 34 publications
(17 citation statements)
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“…Ahn et al obtained SnO 2 thin films by R.F. magnetron sputtering to fabricate high performance C 2 H 4 gas sensors (Ahn et al, 2010 ). Chen et al discovered that the 5 wt% Pd-doped SnO 2 sensor could detect C 2 H 6 at 400°C, and the sensor exhibited the largest gas-sensitive response of 5.89 toward 100 ppm C 2 H 6 (Chen et al, 2013a ).…”
Section: Sensing Performances Of Sno 2 -Based Sensmentioning
confidence: 99%
“…Ahn et al obtained SnO 2 thin films by R.F. magnetron sputtering to fabricate high performance C 2 H 4 gas sensors (Ahn et al, 2010 ). Chen et al discovered that the 5 wt% Pd-doped SnO 2 sensor could detect C 2 H 6 at 400°C, and the sensor exhibited the largest gas-sensitive response of 5.89 toward 100 ppm C 2 H 6 (Chen et al, 2013a ).…”
Section: Sensing Performances Of Sno 2 -Based Sensmentioning
confidence: 99%
“…Ethylene sensors based on chemoresistive [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18], optical (NDIR) [19][20][21][22], colorimetric [23][24][25], luminescence [26], fluorescence [27], piezoelectric [28][29][30], and electrochemical [31][32][33][34] principles have been developed. Each such principle has its own advantages and limitations, the comparison of which can be found in several review articles [35][36][37][38].…”
Section: Introductionmentioning
confidence: 99%
“…However, sensors based on chemo-resistive metal oxide-based semiconductors have certain advantages such as short response time, long lifetime and low cost. Metal oxide semiconductors such as SnO 2 , TiO 2 , WO 3 and MoO 3 have been investigated extensively for gas sensing (Ahna et al, 2010;Comini et al, 2004;Nimittrakoolchai and Supothina, 2008). Among these, TiO 2 has gained much more importance for gas sensing due to its catalytic performance, non-toxicity and stability (Gholami et al, 2012).…”
Section: Introductionmentioning
confidence: 99%