Effect of Annealing on Conductivity Type of Nanocrystalline ZnO Films Fabricated by RF Magnetron Sputtering

Abstract

Nanocrystalline ZnO films were deposited by rf reactive magnetron sputtering. The films were characterized by reflection high-energy electron diffraction, X-ray photoelectron spectroscopy and gas sensing measurements. It was found that annealing of the film enabled to invert its conductivity type. Thus, as-deposited ZnO film showed p-type conductivity while annealed film showed n-type conductivity behavior. The p-and n-type conductivities of the films obtained by gas sensing measurements have been confirmed by XPS results. The gas sensing properties of the films were investigated upon exposure to 10 ppm of NO2at 22°C and exhibited good sensitivity with fast response and recovery times. The sensor response to NO2was found to be profoundly dependent on the conductivity behavior of the film.

Generation and Diagnostics of Ambient Air Glow Discharge in Centimeter-Order Gaps

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Scalable Treatment of Flowing Organic Liquids Using Ambient-Air Glow Discharge for Agricultural Applications

“…The fast development of low-temperature atmospheric-pressure plasma sources, which happened in last two decades, has led to the appearance of a huge number of new applications [1][2][3][4][5][6]. Developments of atmospheric pressure plasma sources allowed treatments of various targets by reactive species not employing vacuum systems; moreover, use of nonequilibrium or so-called "cold" plasmas made possible target treatment without thermal damage, which opened a door for use of plasmas in biomedical and agricultural applications [4,5,[7][8][9][10]. A promising topic is liquid treatment by plasma and following the use of the treated liquid in medicine or agriculture [4,7,[11][12][13].…”

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“…The rapid development of atmospheric-pressure plasma sources over the last two decades has led to the use of plasma in a large number of applications where samples are not compatible under low-pressure conditions [1]- [5]. Additionally, the development of nonequilibrium (so-called "cold") atmospheric-pressure plasma allowed the plasma treatment of biological targets and opened doors for the use of plasma technologies in medicine, agriculture, and even farming [3], [6]- [14].…”