2022
DOI: 10.1016/j.spmi.2022.107157
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Effect of annealing on solar blind photodetector based on β-Ga2O3 nanobelt grown by carbothermal reduction

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“…Most Ga 2 O 3 /GaN heterointerfaces were developed by depositing Ga 2 O 3 on the GaN surface utilizing numerous techniques such as metalorganic chemical vapour deposition (MOCVD), sputtering, thermal oxidation, and pulse laser deposition. , Among various approaches, MOCVD has the demerit of using hazardous precursors that restrict the feasibility of mass production . Also, while depositing the film using sputtering and pulsed laser deposition (PLD), the substrate surface preparation may be critical in determining the adhesion; the setup cost is also very high. , On the other hand, thermal oxidation is a simple and convenient method for creating oxides directly on the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Most Ga 2 O 3 /GaN heterointerfaces were developed by depositing Ga 2 O 3 on the GaN surface utilizing numerous techniques such as metalorganic chemical vapour deposition (MOCVD), sputtering, thermal oxidation, and pulse laser deposition. , Among various approaches, MOCVD has the demerit of using hazardous precursors that restrict the feasibility of mass production . Also, while depositing the film using sputtering and pulsed laser deposition (PLD), the substrate surface preparation may be critical in determining the adhesion; the setup cost is also very high. , On the other hand, thermal oxidation is a simple and convenient method for creating oxides directly on the substrate.…”
Section: Introductionmentioning
confidence: 99%