Effect of annealing on structural and optical properties of diamond-like nanocomposite thin films

Jana, Sumanta; Das, Sayan; De, Debasish; Gangopadhyay, Utpal; Ghosh, Pallabi; Mondal, Anup

doi:10.1007/s00339-013-8044-1

Cited by 26 publications

(6 citation statements)

References 26 publications

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“…This tendency confirms the growth of defects, which produce localized states in the gap. The temperature intervals of these changes are consistent with those obtained for the ellipsometrical extinction coefficient, which increased at a deposition temperature of 600 • C. The narrowing of the optical bandgap with the graphitization of the material is also discussed in [76][77][78].…”

Section: Optical Propertiessupporting

confidence: 79%

1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor

et al. 2023

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We report an investigation into 1,4-Bis-N,N-(trimethylsilyl)piperazine (BTMSP) as a novel precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD). The thermal stability, temperature dependence of vapor pressure and thermodynamic constants of the evaporation process of BTMSP were determined by static tensimetry with a glass membrane zero manometer. The transformation of the compound in low-power (25 W) plasma conditions was investigated by optical emission spectroscopy. It was shown that BTMSP undergoes destruction, accompanied by H and CH elimination and CN formation. SiCN(H) films were deposited in a hot-wall plasma-enhanced CVD reactor. The optical properties of the films were studied by spectral ellipsometry (refractive index: 1.5–2.2; absorption coefficient: 0–0.12) and UV–Vis spectroscopy (transmittance: up to 95%; optical bandgap: 1.6–4.9 eV). Information on the aging behavior of the films is also provided. The transformation of the films occurred through water adsorption and the formation of Si–O bonds with the degradation of Si–H, N–H and Si–CHx–Si bonds.

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Section: Optical Propertiessupporting

confidence: 79%

1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor

et al. 2023

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“…The transferred h-BN film can be detected as indicated by the characteristic peak at 1370 cm -1 which corresponds to the in-plane B-N stretching mode. [47][48][49] Incorporation of hydroxyl group is evident on both bare Si and h-BN/Si samples after air annealing, as revealed by the new additional peaks at 3570 cm -1 and 3740 cm -1 which correspond to O-H stretching vibrational mode, [50][51][52][53][54][55] confirming the presence of hydroxyl group on h-BN/Si after air annealing.…”

Section: S6 Supporting Information)mentioning

confidence: 82%

Smoothening of wrinkles in CVD-grown hexagonal boron nitride films

Lin

Tay

et al. 2018

Nanoscale

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Hexagonal boron nitride (h-BN) is an ideal substrate for two-dimensional (2D) materials because of its unique electrically insulating nature, atomic smoothness and low density of dangling bonds. Although mechanical exfoliation from bulk crystals produces the most pristine flakes, scalable fabrication of devices is still dependent on other more direct synthetic routes. To date, the most utilized method to synthesize large-area h-BN films is by chemical vapor deposition (CVD) using catalytic metal substrates. However, a major drawback for such synthetic films is the manifestation of thermally-induced wrinkles, which severely disrupt the smoothness of the h-BN films. Here, we provide a detailed characterization study of the microstructure of h-BN wrinkles and demonstrate an effective post-synthesis smoothening route by thermal annealing in air. The smoothened h-BN film showed an improved surface smoothness by up to 66% and resulted in a much cleaner surface due to the elimination of polymer residues with no substantial oxidative damage to the film. The unwrinkling effect is attributed to the hydroxylation of the h-BN film as well as the substrate surface, resulting in a reduction in adhesion energy at the interface. Dehydroxylation occurs over time under ambient conditions at room temperature and the smoothened film can be restored back with the intrinsic properties of h-BN. This work provides an efficient route to achieve smoother h-BN films, which are beneficial for high-performance 2D heterostructure devices.

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“…They concluded the tailorability of electrical and Diamond-like properties of DLN thina film make them suitable for application requiring both wear resistance and electrical tailorability [33] . T.W.Scharf et al 2003 reported the frictional behavior of amorphous diamond-like nanocomposite coatings in low speed, dry sliding contact using a home-built in-situe Raman tribometer [34] . Hauert R et al investigated on tailored tribological and biological behaviour of DLC [35] .…”

Section: Bursikova Vilma Et Al Recorded Laser Ablation Ofmentioning

confidence: 99%

“…DLN coating have excellent bulk and surface property as well as thermal stability. This can be used as tribological coatings, chemical protective coatings [23][24][25]27,34] and abrasion resistant coatings. It has optical transparency over a wide bandwidth which includes visible light and infrared.…”

Section: Bursikova Vilma Et Al Recorded Laser Ablation Ofmentioning

confidence: 99%

Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Adhikary¹,

Das

De³

et al. 2018

CAN

Self Cite

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Diamond-like Nanocomposites (DLN) is a newly member in amorphous carbon (a:C) family. It consists of two or more interpenetrated atomic scale network structure. The amorphous silicon oxide (a:SiO) is incorporated within diamond-like carbon (DLC) matrix i.e. a:CH and both the network is interpenetrated by Si-C bond. Hence, the internal stress of deposited DLN film decreases remarkably compare to DLC. The diamond like properties has come due to

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Effect of annealing on structural and optical properties of diamond-like nanocomposite thin films

Cited by 26 publications

References 26 publications

1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor

1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor

Smoothening of wrinkles in CVD-grown hexagonal boron nitride films

Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

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