Effect of Annealing Process on Properties of Pb(Zr0.52Ti0.48)O3Thin Films Prepared by Sol-Gel Method

Li, Junhong; Wang, Chenghao; Liu, Mengwei; Ma, Jun

doi:10.1080/00150193.2013.814019

Cited by 7 publications

(1 citation statement)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The PZT was formed by solgel techniques on an oxidized silicon wafer coated with Pt/Ti (300 nm/20 nm). The PZT (INOSTEK; thickness 400 nm) was formed by a sol-gel process on an oxidized silicon wafer coated with Pt/Ti (300 nm/20 nm), following the procedures of Li et al 47 A 0.4-M precursor solution consisted of zirconium n-propoxide, titanium isopropoxide and lead acetate trihydrate with acetic acid and propyl alcohol as the solvents. The prepared solution was spin-cast onto the Pt/Ti/SiO2/Si (100) substrate at 3,000 r.p.m.…”

Section: Methodsmentioning

confidence: 99%

Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring

et al. 2014

View full text Add to dashboard Cite

The ability to measure subtle changes in arterial pressure using devices mounted on the skin can be valuable for monitoring vital signs in emergency care, detecting the early onset of cardiovascular disease and continuously assessing health status. Conventional technologies are well suited for use in traditional clinical settings, but cannot be easily adapted for sustained use during daily activities. Here we introduce a conformal device that avoids these limitations. Ultrathin inorganic piezoelectric and semiconductor materials on elastomer substrates enable amplified, low hysteresis measurements of pressure on the skin, with high levels of sensitivity (B0.005 Pa) and fast response times (B0.1 ms). Experimental and theoretical studies reveal enhanced piezoelectric responses in lead zirconate titanate that follow from integration on soft supports as well as engineering behaviours of the associated devices. Calibrated measurements of pressure variations of blood flow in near-surface arteries demonstrate capabilities for measuring radial artery augmentation index and pulse pressure velocity.

show abstract

Section: Methodsmentioning

confidence: 99%

Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring

et al. 2014

View full text Add to dashboard Cite

show abstract

Tactile Sensors for Advanced Intelligent Systems

Wang

Dong

Peng

et al. 2019

Advanced Intelligent Systems

105

View full text Add to dashboard Cite

With the capability of completing a task or achieving a goal in an uncertain environment while simultaneously having the characteristics of adaptability, self‐optimization, self‐diagnostics, and self‐maintenance, intelligent systems have witnessed extraordinary progress in recent years. These advances involve robotics, artificial intelligence and machine learning, automation, human–machine interfaces, the Internet of Things, control theory and control systems, smart and responsive materials, intelligent sensing systems, and programmed self‐assembly. As an active technology conveying mechanical stimuli to a wide range of electrical and optical signals, tactile sensors are essential elements of intelligent systems and have accelerated the emergence of advanced intelligent systems by enabling the accurate recognition and safe interaction of humans and machines, smart sensing of control systems, precise control of robotics, and synergetic work of artificial intelligent systems. Herein, the recent advances of tactile sensors for advanced intelligent systems are reviewed, emphasizing these with the working principles of piezoresistance, resistance, capacitance, piezoelectricity, triboelectricity, and optics. Representative examples of their applications in advanced intelligent systems, such as robotics, human–machine interfaces, and artificial intelligence, are explored. The remaining challenges and perspectives in this emerging field are also discussed.

show abstract