2015
DOI: 10.18052/www.scipress.com/ilcpa.56.63
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Effect of Annealing Temperature on the Optical Properties of TiO<sub>2</sub> Thin Films Prepared by Pulse Laser Deposition

Abstract: ABSTRACT. TiO 2 thin films were prepared by pulse laser deposition technique on glass substrates with laser power 700 mJ and 900 shot at distance 1cm under vacuum of 10 -2 mbar with different annealing temperature (273, 373, 423)K. The influences of the annealing temperature on the optical properties of TiO 2 thin films were mainly investigated. TiO 2 is a wide band gap n-type semiconductor that has a wide range of applications. It was found that the optical properties of TiO 2 thin films were dependent on the… Show more

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Cited by 9 publications
(5 citation statements)
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“…It is well known that crystalline TONTs have wider band gaps than amorphous, indicating that ordering suppresses the localized levels that are usually present in the amorphous. These levels generate tails in the optical energy gap thus, reducing the energy gap of amorphous [39][40][41]. The same trend of reduction in band gap with improved crystallization is found in the present case too.…”
Section: Resultssupporting
confidence: 84%
“…It is well known that crystalline TONTs have wider band gaps than amorphous, indicating that ordering suppresses the localized levels that are usually present in the amorphous. These levels generate tails in the optical energy gap thus, reducing the energy gap of amorphous [39][40][41]. The same trend of reduction in band gap with improved crystallization is found in the present case too.…”
Section: Resultssupporting
confidence: 84%
“…The films annealed at 600 o C showed the optical band gap of 4.50 eV. Such a decrease in the optical band gap with annealing temperature was also noticed in pulsed lased deposited and sputter deposited TiO 2 films [7,15,23]. In general, refractive index of the films decreased with increase of the wavelength.…”
Section: Resultssupporting
confidence: 52%
“…The traditional dielectrics silicon dioxide (SiO 2 ) and silicon nitride (Si 3 N 4 ) have low dielectric constants, low capacitance and high leakage currents restricted to down scaling the devices [2]. For high performance of MIM capacitors, various high dielectric thin films such as Al 2 O 3 , HfO 2 , ZrO 2 , TiO 2 and Ta 2 O 5 have been investigated in order to achieve high capacitance density with reduced leakage current density [3][4][5][6][7]. Among these materials, aluminum titanate(Al 2 TiO 5 ) is a high-k dielectric with good radio frequency performance.…”
Section: Introductionmentioning
confidence: 99%
“…Extinction coefficient versus wavelength was presented in the Figure 3 Same behavior of absorption coefficient was noticed in extinction coefficient with the increment of Fe content. ' Figure 4' depicts the relation between refractive index (n) and wavelength (λ) that obtained from the formula [12]:…”
Section: Resultsmentioning
confidence: 99%