2012
DOI: 10.1109/led.2012.2193658
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Effect of Annealing Temperature on $\hbox{TiO}_{2}$ -Based Thin-Film-Transistor Performance

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Cited by 24 publications
(20 citation statements)
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“…The TiO 2 films are subjected to a rapid thermal annealing at 500 C for 10 min under Oxygen/Nitrogen environment to improve the crystallinity of the samples. 20 The top contact on TiO 2 is made by depositing 100 nm of Titanium and Aluminium on to the TiO 2 sample on insulating glass substrate by means e-beam and thermal evaporation, respectively. Room temperature I-V characteristics are measured in vacuum using a Desert cryogenic probe station interfaced with a Keithley 4200 source meter.…”
Section: Methodsmentioning
confidence: 99%
“…The TiO 2 films are subjected to a rapid thermal annealing at 500 C for 10 min under Oxygen/Nitrogen environment to improve the crystallinity of the samples. 20 The top contact on TiO 2 is made by depositing 100 nm of Titanium and Aluminium on to the TiO 2 sample on insulating glass substrate by means e-beam and thermal evaporation, respectively. Room temperature I-V characteristics are measured in vacuum using a Desert cryogenic probe station interfaced with a Keithley 4200 source meter.…”
Section: Methodsmentioning
confidence: 99%
“…Figure 5 shows the 26 Crystallization was confirmed by the TEM images, and once crystallized, the average grain size increased with annealing temperature, from approximately 200 nm at 450 C to about 400 nm at 550 C. The formation of grain boundaries is significantly associated with the electrical properties of a material. In order to investigate the microstructure of the films, XRD and TEM data were measured at different annealing temperatures.…”
Section: Methodsmentioning
confidence: 90%
“…Due to higher annealing temperature, the oxygen in air diffused into the films and filled the oxygen vacancy defects easier, presenting a more compact structure and better crystallinity. The higher mobility originates from the larger domains and fewer grain boundaries in TSO channel layers . To an oxide TFT, the mobility is the larger the better without deterioration of other parameters, because it is able to drive larger‐area and higher‐definition flat panel displays.…”
Section: Resultsmentioning
confidence: 99%