In this study, the (Ca0.95M0.05)V2O6 (M = Zn, Ba) and the CaV2O6 ceramics were synthesized through a solid‐state reaction method, and the effects of Zn2+ and Ba2+ substitution on the structure, sintering temperature, densification, microstructure and microwave dielectric properties of CaV2O6 ceramic were analysed. The XRD patterns of the sintered samples indicated a single‐phase of CaV2O6 in all temperatures. Substitution of Zn2+ caused a lower sintering temperature and improved the densification of the CaV2O6 ceramic. While the dielectric properties of the (Ca0.95Ba0.05)V2O6 compound were not desirable, the (Ca0.95Zn0.05)V2O6 sample sintered at 650°C for 4 hours showed significant dielectric properties, with εr = 10.29, Q × f ~ 53 000 GHz (at 15.5 GHz) and τf = −72.37 ppm/°C. Moreover, the chemical compatibility of the CaV2O6 ceramic with Al electrode was examined.