Effect of Ar/N2 flow ratio on the microstructure and mechanical properties of Ti-Cr-N coatings deposited by DC magnetron sputtering on AISI D2 tool steels

Kehal, Abdelkrim; Saoula, Nadia; Abaidia, S.E.H.; Nouveau, Corinne

doi:10.1016/j.surfcoat.2021.127444

Cited by 20 publications

(9 citation statements)

References 73 publications

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“…The highest value of H/E and H 3 /E 2 ratio are 0.082 and 0.168 GPa, respectively at the reactive N 2 flow of 25 sccm. This demonstrates that the TiN coating possesses greater toughness and crack resistance, and higher H/E and H 3 /E 2 ratio may be related to lower wear [32,33]. coatings with higher reactive N 2 flow.…”

Section: Mechanical Propertiesmentioning

confidence: 86%

Impact of reactive nitrogen flow on morphology, mechanical properties, and biocorrosion behavior of sputtered TiN coatings towards orthopedic applications

Van Duong,

Phuong,

Linh

et al. 2023

Surf. Topogr.: Metrol. Prop.

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This work aimed to investigate the effects of reactive nitrogen flow on the morphology, mechanical properties, and biocorrosion behavior of TiN coatings deposited on Ti6Al4V alloys and Si (100) wafer by direct current (DC) magnetron sputtering technique. From analysis results of X-ray diffraction (XRD) and scanning electron microscope (SEM), it revealed that the preferred orientation of the coatings changed from TiN (111) to TiN (200) plane, and the surface morphology altered from faceted structures to closed sphere structures with the increasing reactive N2 flow. The high density and fine grain size of the coating deposited with a reactive N2 flow of 25 sccm resulted in the highest hardness (24.8 ± 1.8 GPa) and the best corrosion resistance. In addition, the friction coefficient was reduced owing to the decrease in the grain size as reactive N2 flow increased from 10 to 30 sccm. Compared with Ti6Al4V substrate, TiN coatings possess better corrosion resistance, suggesting that the coating is beneficial for improving the performance of the Ti6Al4V alloys.

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Section: Mechanical Propertiesmentioning

confidence: 86%

Impact of reactive nitrogen flow on morphology, mechanical properties, and biocorrosion behavior of sputtered TiN coatings towards orthopedic applications

Van Duong,

Phuong,

Linh

et al. 2023

Surf. Topogr.: Metrol. Prop.

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“…In the chamber of PVD coating, in addition to sputtering power, the pressure and flow rate of working gas are also the main factors affecting the energy of sputtering particles. At present, the research on gas flow rate focuses on the process of reactive magnetron sputtering, involving the influence of the flow rate ratio of reactive gas and argon on the reaction products of the coating [20,21]. At the same time, there are few studies on the flow rate of a single working gas.…”

Section: Introductionmentioning

confidence: 99%

Effect of Argon Flow Rate on Tribological Properties of Rare Earth Ce Doped MoS2 Based Composite Coatings by Magnetron Sputtering

Tian,

Cai,

Xue

et al. 2023

Lubricants

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Exploring the doping components of the coating is of great significance for improving the tribological properties of the MoS2-based coating. The optimization of magnetron sputtering process parameters can also improve the coating quality. In this paper, the effects of working gas flow rate on the microstructure in a vacuum chamber, nano-hardness, and tribological properties of Ce-Ti/MoS2 coatings were studied using DC and RF unbalanced co-sputtering technology. It is found that the coating structure was coarse and porous when the Ar flow rate was excessive (70 sccm), significantly affecting the mechanical properties; there are pit defects on the surface of the coating when the flow rate is just minor (30 sccm), and the coating easily falls off during the friction process. When the flow rate is 40~60 sccm, the coating grows uniformly, the hardness reaches 7.85 GPa at 50 sccm, and the wear rate is only 4.42 × 10−7 mm3 N−1 m−1 at 60 sccm. The coating doped with Ce and Ti is an approximate amorphous structure. Under appropriate gas flow rate conditions, the friction induces a transfer film with a layered structure, and the MoS2 (002) crystal plane orientation is arranged in parallel at the edge of the wear debris, effectively reducing the shear force during sliding and reducing wear. Based on rare earth doping, this study improves the tribological properties by optimizing the working gas parameters, which plays a reference role in preparing high-quality MoS2-based coatings.

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“…Changing the gas flow ratio also alters the surface morphology of the coatings. For instance, lower Ar/N 2 ratios lead to a pyramidal structure with higher surface roughness, while higher Ar/N 2 ratios result in a smoother, cauliflowerlike structure with lower surface roughness [19].…”

Section: Introductionmentioning

confidence: 99%

Growth of Nanostructured TiO2 Thin Films onto Lignocellulosic Fibers through Reactive DC Magnetron Sputtering: A XRD and SEM Study

2023

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TiO2 thin films were deposited on ginger lily (Hedychium gardnerianum) fibers using a custom-made DC reactive magnetron sputtering system with Ar/O2 mixture at two O2/(O2 + Ar) ratios (50% O2 and 75% O2) and sputtering powers (500 and 1000 W), and their effects on the structure and surface morphology of TiO2 films were investigated. XRD analysis showed the presence of the mainly anatase phase in the deposited films, with a small fraction of rutile phase detected for TiO2 deposited with the higher oxygen percentage and sputtering power. SEM imaging revealed that the films exhibited distinct surface features depending on the deposition conditions. Specifically, films deposited with 50 O2 % and 1000 W exhibited porosity, while the films deposited under other conditions appeared either dense with a cauliflower-like appearance or displayed surface features resembling lines and mountain ranges of coalesced particles. The grain size of dense films increased with increasing sputtering power. The deposition conditions significantly affected the resulting surface topography, with an increase in surface roughness parameters observed for both power levels when the oxygen concentration in the deposition atmosphere was increased from 50% to 75%. The adhesion tests conducted using sonication and EDS analysis revealed that almost all of the studied films exhibited good adhesion, as evidenced by the atomic content (at. %) of Ti remaining intact after sonication, indicating good adhesion. However, the porous film exhibited a slightly lower adhesion grade, suggesting that the porous structure may have influenced the adhesion properties.

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Effect of Ar/N2 flow ratio on the microstructure and mechanical properties of Ti-Cr-N coatings deposited by DC magnetron sputtering on AISI D2 tool steels

Cited by 20 publications

References 73 publications

Impact of reactive nitrogen flow on morphology, mechanical properties, and biocorrosion behavior of sputtered TiN coatings towards orthopedic applications

Impact of reactive nitrogen flow on morphology, mechanical properties, and biocorrosion behavior of sputtered TiN coatings towards orthopedic applications

Effect of Argon Flow Rate on Tribological Properties of Rare Earth Ce Doped MoS2 Based Composite Coatings by Magnetron Sputtering

Growth of Nanostructured TiO2 Thin Films onto Lignocellulosic Fibers through Reactive DC Magnetron Sputtering: A XRD and SEM Study

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