Effect of Argon Deposition Pressure on the Properties of Aluminum-Doped ZnO Films Deposited Layer-By-Layer Using Magnetron Sputtering

Popovych, V.; Євтушенко, А. І.; Lytvyn, O. S.; Romanjuk, V.R.; Ткач, В. М.; Baturyn, V.A.; Karpenko, A.; Дранчук, М. В.; Klochkov, L. O.; Dushejko, M. G.; Karpyna, V. A.; Лашкарьов, Г. В.

doi:10.15407/ujpe61.04.0325

Cited by 3 publications

(1 citation statement)

References 16 publications

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“…In addition to chemical methods for the synthesis of thin nanostructured zinc oxide films, various methods for obtaining such materials are also widely used. For example, in [6], ZnO:Al thin films were deposited on solid substrates by layer-by-layer deposition in a high-frequency magnetron, and in [7], the results of a study of the structure, morphology, and luminescence of ZnO nanostructures, which were synthesized by electrothermal and electric discharge sputtering, are presented. In a significant number of cases, the method of pulsed laser deposition is also used [8].…”

Section: Introductionmentioning

confidence: 99%

Conditions For "Cold" Gas-Discharge Synthesis of Zinc Oxide And Silver Sulfide Nanostructures Under Automatic Assisting With Ultraviolet Radiation

Шуаибов¹,

Minya²,

Hrytsak³

et al. 2022

Biomed Transl Sci

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The characteristics and parameters of the plasma of an overvoltage nanosecond discharge in oxygen, which was ignited between zinc electrodes in oxygen, are presented. Zinc vapors were introduced into the discharge due to microexplosions of natural inhomogeneities on the surfaces of zinc electrodes in a strong electric field. This creates the prerequisites for the synthesis of thin nanostructured zinc oxide films, which can be deposited on a rigid dielectric substrate placed near the electrode system. The results of a study of the optical characteristics of an overvoltage nanosecond discharge with a discharge gap of d=2mm are presented. The identification of the plasma radiation spectra made it possible to establish the main excited plasma products that form the plasma UV radiation spectrum and simultaneously act as a pulsed source of clusters and small particles of zinc oxide. The characteristics of an overvoltage nanosecond discharge in air between polycrystalline electrodes made of a supericonic conductor Ag2 S are presented. In the process of microexplosions of inhomogeneities on the working surfaces of electrodes in a strong electric field, vapors of the Ag2 S compound and its dissociation products in plasma are introduced into the interelectrode space. This creates prerequisites for the synthesis of thin structured films that have the properties of superionic conductors and can be deposited on a dielectric substrate placed near the discharge gap. The spatial, electrical, and spectral characteristics of the discharge, the Raman scattering spectra of the synthesized films, and the homogeneity of their surface are studied.

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Section: Introductionmentioning

confidence: 99%

Conditions For "Cold" Gas-Discharge Synthesis of Zinc Oxide And Silver Sulfide Nanostructures Under Automatic Assisting With Ultraviolet Radiation

Шуаибов¹,

Minya²,

Hrytsak³

et al. 2022

Biomed Transl Sci

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The effect of pressure on synthetic diamond crystals at high temperatures and pressures in an Fe/Ni catalyst system

et al. 2021

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Conditions for the Synthesis of Zinc Oxide Nanostructures from the Destruction Products of Overvoltage Nanosecond Discharge Between Zinc Electrodes in Oxygen Under Ultraviolet Irradiation of the Substrate

2023

Nanosistemi, Nanomateriali, Nanotehnologii

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 2023 ІМФ (Інститут металофізики ім. Г. В. Курдюмова НАН України) Надруковано в Україні. 74 О. К. ШУАІБОВ, О. Й. МИНЯ, Р. В. ГРИЦАК, А. О. МАЛІНІНА та ін.films, which can be deposited on a solid dielectric substrate installed near the electrode system. The results of the study of the optical characteristics of the overstressed nanosecond discharge at the value of the discharge interval d2 mm are presented. Identification of plasma radiation spectra allows establishing the main excited plasma products, which form the spectrum of UV radiation of plasma and act simultaneously as a pulsed source of clusters and small particles of zinc oxide. The method of numerical modelling of plasma parameters of the zinc and oxygen vapour discharge, which is based on the solution of the Boltzmann kinetic equation for the electron-energy distribution function, is used to calculate the plasma parameters (T e -temperature, N e -electron density, rate constants of electronic reactions) depending on the value of the E/N ratio (where E-electric field strength, N-total concentration of discharge particles).

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Effect of Argon Deposition Pressure on the Properties of Aluminum-Doped ZnO Films Deposited Layer-By-Layer Using Magnetron Sputtering

Cited by 3 publications

References 16 publications

Conditions For "Cold" Gas-Discharge Synthesis of Zinc Oxide And Silver Sulfide Nanostructures Under Automatic Assisting With Ultraviolet Radiation

Conditions For "Cold" Gas-Discharge Synthesis of Zinc Oxide And Silver Sulfide Nanostructures Under Automatic Assisting With Ultraviolet Radiation

The effect of pressure on synthetic diamond crystals at high temperatures and pressures in an Fe/Ni catalyst system

Conditions for the Synthesis of Zinc Oxide Nanostructures from the Destruction Products of Overvoltage Nanosecond Discharge Between Zinc Electrodes in Oxygen Under Ultraviolet Irradiation of the Substrate

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