2022
DOI: 10.1016/j.surfcoat.2022.129028
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Effect of carbon content on the structural, mechanical and corrosion properties of TiC films deposited using a HiPIMS discharge

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Cited by 14 publications
(4 citation statements)
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“…The magnetron was powered by a Melec SPIK3000A pulsing unit, supplied by an ADL 10 kW/1000 V DC power supply. The pulse configuration used is a sequence of three short pulses of 30 μs each, spaced by 50 μs delay time, with a duty time of 5%, as illustrated in Figure b …”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The magnetron was powered by a Melec SPIK3000A pulsing unit, supplied by an ADL 10 kW/1000 V DC power supply. The pulse configuration used is a sequence of three short pulses of 30 μs each, spaced by 50 μs delay time, with a duty time of 5%, as illustrated in Figure b …”
Section: Methodsmentioning
confidence: 99%
“…The pulse configuration used is a sequence of three short pulses of 30 μs each, spaced by 50 μs delay time, with a duty time of 5%, as illustrated in Figure 1b. 31 The vacuum chamber was evacuated to a base pressure below 5 × 10 −6 mbar. Prior to deposition, the Si target was sputtered clean for 10 min by using Ar gas (purity, 99.999%).…”
Section: Deposition Of Si On Graphite Electrodes Using Hipimsmentioning
confidence: 99%
“…CIGS thin films were deposited from a CIGS planar rectangular compound target (Testbourne, 568 Â 117 mm 2 , 99.99% purity) using the Cross-field PVD 400 unbalanced magnetron sputtering equipment. [78,79] ADL 10 kW/1000 V DC power supply fed a Melec SPIK3000A HiPIMS pulsing machine, which powered the magnetron source. A computercontrolled system was used to run the sputtering power supply in a power-regulated mode.…”
Section: Methodsmentioning
confidence: 99%
“…By directly incorporating TiC ceramic into 410 Martensitic stainless steel through laser cladding microhardness and wear resistance were considerably enhanced [12]. Improved microhardness and corrosion resistance were observed for the TiC layer coated by High Power Impulse Magnetron Sputtering under an Ar-C 2 H 2 atmosphere with 20% carbon concentration in the film [13]. As the coating thickness increased, the increased deposits on the surface of Ni 3 Al-Al 2 O 3 -Al 2 O 3 /MgO composition coated over AISI 316 stainless steel led to the creation of a uniform layer.…”
Section: Introductionmentioning
confidence: 99%