Effect of CH4 and H2 on CVD of SiC and TiC for possible fabrication of SiC/TiC/C FGM

Jung, Yeon‐Gil; Park, Sung-Wan; Choi, Seok Cheol

doi:10.1016/s0167-577x(96)00221-2

Cited by 26 publications

(7 citation statements)

References 7 publications

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“…In CVD, the coating material is vaporized by means of heating or reducing the pressure and the transferred to the material to be coated that stays in a chamber under vacuum condition. Vapor deposition techniques are used extensively to produce thin FGMs [55,56]. Wan et al [57] used chemical vapor deposition (CVD) for diamond coating Cu-W and Cu50-WC composites and observed satisfactory bonding strength.…”

Section: Conventional Manufacturing Of Fgmsmentioning

confidence: 99%

Vat Photopolymerization Additive Manufacturing of Functionally Graded Materials: A Review

Nohut

Schwentenwein²

2022

JMMP

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Functionally Graded Materials (FGMs) offer discrete or continuously changing properties/compositions over the volume of the parts. The widespread application of FGMs was not rapid enough in the past due to limitations of the manufacturing methods. Significant developments in manufacturing technologies especially in Additive Manufacturing (AM) enable us nowadays to manufacture materials with specified changes over the volume/surface of components. The use of AM methods for the manufacturing of FGMs may allow us to compensate for some drawbacks of conventional methods and to produce complex and near-net-shaped structures with better control of gradients in a cost-efficient way. Vat Photopolymerization (VP), a type of AM method that works according to the principle of curing liquid photopolymer resin layer-by-layer, has gained in recent years high importance due to its advantages such as low cost, high surface quality control, no need to support structures, no limitation in the material. This article reviews the state-of-art and future potential of using VP methods for FGM manufacturing. It was concluded that improvements in printer hardware setup and software, design aspects and printing methodologies will accelerate the use of VP methods for FGMs manufacturing.

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Section: Conventional Manufacturing Of Fgmsmentioning

confidence: 99%

Vat Photopolymerization Additive Manufacturing of Functionally Graded Materials: A Review

Nohut

Schwentenwein²

2022

JMMP

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“…The hydrocarbons often employed in SiCl4-based SiC CVD are mainly aliphatic hydrocarbons e.g. methane (CH4) [74][75][76][77][78][79][80][81][82][83][84] , propane (C3H8) 50,73,81,85,86 , acetylene (C2H2) 81 etc. The use of aromatic hydrocarbons as the carbon precursor, e.g.…”

Section: Cvd Growth Of Polycrystalline 3c-sicmentioning

confidence: 99%

Surface-Controlled Chemical Vapor Deposition of Silicon Carbide

Huang

2022

Linköping Studies in Science and Technology. Dissertations

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for the assistance in measurements and fruitful discussions in the weekly group meetings.Special thanks are given to Georgios Rizothanasis, Emilie Lindblad and Sarah McIntyre for all the Friday evenings we have spent in exploring restaurants in Linköping. In the end, I would like to wholeheartedly thank my parents, 黃坤德 and 林淑貞, and my sisters, 黃琳宴 and 黃伊婷 for their unconditional and endless support from Taiwan.

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“…C(s) + TiCl 4 (g) + 2 H 2 (g) = TiC(s) + 4 HCl(g) [2] Single fibres are attached to a graphite frame with a carbon paste and introduced in a vertical reactor heated by an electrical resistance furnace. A TiCl 4 /H 2 pulse consists of three successive stages: (i) a first stage during which the gases are briefly introduced into the reactor, (ii) a second stage during which the gases react with the substrate in the closed reactor and (iii) a third stage during which the gases are evacuated (5).…”

Section: Synthesis Of the Tic Coatingmentioning

confidence: 99%

Study of TiC Coatings on Nicalon Fibre Prepared by Pressure-Pulsed Reactive Chemical Vapour Deposition at Low Pressure

Jouanny¹,

Jacques²,

Weisbecker³

et al. 2009

ECS Trans.

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TiC coatings on Nicalon SiC-based fibres were obtained in two steps; the first step consisted in converting the surface of the Nicalon fibre into nanoporous carbon by a chlorine treatment at 773 K, the second step consisted in converting this nanoporous carbon film into TiC by pressure-Pulsed Reactive Chemical Vapour Deposition at low pressure with a H 2 /TiCl 4 mixture at 1373 K. The coatings were characterized by X-ray photoelectron spectroscopy, Auger electron spectroscopy and scanning and transmission electron microscopies. Mechanical assessment was achieved by tensile tests at room temperature. The conversion rate of C into TiC was studied varying the number of H 2 /TiCl 4 pulses from 0 to 100. The formation of a thin interlayer between the fibre and the nanoporous carbon coating was revealed as soon as only 20 pulses are used. The conversion rate increases with the number of H 2 /TiCl 4 pulses while the fibre failure stress decreases almost linearly.

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Effect of CH4 and H2 on CVD of SiC and TiC for possible fabrication of SiC/TiC/C FGM

Cited by 26 publications

References 7 publications

Vat Photopolymerization Additive Manufacturing of Functionally Graded Materials: A Review

Vat Photopolymerization Additive Manufacturing of Functionally Graded Materials: A Review

Surface-Controlled Chemical Vapor Deposition of Silicon Carbide

Study of TiC Coatings on Nicalon Fibre Prepared by Pressure-Pulsed Reactive Chemical Vapour Deposition at Low Pressure

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